Summary
In atomic force microscopy (AFM) high-performance and high precision control of the scanning-system is crucial. At high imaging speeds the dynamic behaviour of the scanner may cause imaging artefacts limiting the maximum imaging rate. This contribution discusses recent improvements for faster imaging by utilizing modern mechatronic and control engineering methods.
Zusammenfassung
Für die Rasterkraftmikroskopie (AFM) ist eine schnelle und hochpräzise Führung der AFM-Positioniereinheit und Messspitze ausschlaggebend. Besonders bei hohen Scangeschwindigkeiten führt die Dynamik der AFM-Positioniereinheit zu Abbildungsartefakten, wodurch die maximale Messgeschwindigkeit und Bildqualität eingeschränkt wird. In diesem Artikel werden moderne Ansätze diskutiert, welche zu einer signifikanten Steigerung der Messgeschwindigkeiten führen.
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Literatur
Alexander, S., Hellemans, L., Marti, O., Schneir, J., Elings, V., Hansma, P., Longmire, M., Gurley, J. (1989): An atomic-resolution atomic-force microscope implemented using an optical lever. J. Appl. Phys., 65: 164
Bhikkaji, B., Ratnam, M., Fleming, A. J., Moheimani, S. O. R. (2007): High performance control of piezoelectric tube scanners. IEEE Trans. Control Syst. Technol., 15: 853–866
Binnig, G., Quate, C., Gerber, C. (1986): Atomic force microscope. Phys. Rev. Lett., 56 (9): 930–933
Binnig, G., Smith, D. (1986): Single-tube three-dimensional scanner for scanning tunneling microscopy. Rev. Sci. Instrum., 57: 1688–1698
Croft, D., Shed, G., Devasia, S. (2001): Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy applications. AMSE J. Dyn. Syst. Meas. Control, 123: 35–43
Dosch, J., Inman, D., Garcia, E. (1992): A self-sensing piezoelectric actuator for collocated control. J. Intell. Mater. Syst. Struc., 3: 166–185
Fleming, A., Moheimani, S. (2006): Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners. IEEE Trans. Control Syst. Technol., 14: 33–44
Hansma, P., Schitter, G., Fantner, G., Prater, C. (2006): High speed atomic force microscopy. Science, 314: 601–602
Kuiper, S., Fleming, A., Schitter, G. (2010): Dual actuation for high speed atomic force microscopy. In: Proc. IFAC Mechatronics Conf
Kuiper, S., Schitter, G. (2009): Self-Sensing Actuation and Damping of a Piezoelectric Tube Scanner for Atomic Force Microscopy. European Control Conf., 2009
Kuiper, S., Schitter, G. (2010): Active damping of a piezoelectric tube scanner using self-sensing piezo actuation. Mechatronics, 20: 656–665
Kuiper, S., Schitter, G. (2011): Model-based feedback controller design for dual actuated atomic force microscopy. Mechatronics (in press)
Picco, L., Bozec, L., Ulcinas, A., Engledew, D., Antognozzi, M., Horton, M., Miles, M. (2007): Breaking the speed limit with atomic force microscopy. Nanotechnology, 18 (044030): 4
Rifai, O., Youcef-Toumi, K. (2001): Coupling in piezoelectric tube scanners used in scanning probe microscope. Proc. Amer. Control. Conf., 4: 3251–3255
Salapaka, S., Sebastian, A., Cleveland, J., Salapaka, M. (2002): High bandwidth nano-positioner: a robust control approach. Rev. Sci. Instrum., 73: 3232
Sarid, D. (1994): Scanning force microscopy: with applications to electric, magnetic, and atomic forces. Oxford University Press, USA
Schitter, G. (2009): Improving the Speed of AFM by Mechatronic Design and Modern Control Methods. Tech. Mess., 76 (5): 266–273
Schitter, G., Stemmer, A. (2004): Identification and open-loop tracking control of a piezoelectric tube scanner for high-speed scanning-probe microscopy. IEEE Trans. Control Syst. Technol., 12: 449–454
Schroeck, S., Messner, W. (1999): On controller design for linear time-invariant dual-input singleoutput systems. Proc. Amer. Control Conf., vol. 6
Sebastian, A., Salapaka, S. (2005): Design methodologies for robust nano-positioning. IEEE Trans. Control Syst. Technol., 13 (6): 868–876
Sulchek, T., Minne, S., Adams, J., Fletcher, D., Atalar, A., Quate, C., Adderton, D. (1999): Dual integrated actuators for extended range high speed atomic force microscopy. Appl. Phys. Lett., 75: 1637–1639
Tamer, N., Dahleh, M. (1994): Feedback control of piezoelectric tube scanners. In: Proc. 33rd IEEE Conf. Decis. Control, 2: 1826–1831
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Steininger, J., Kuiper, S., Ito, S. et al. Schnelle Rasterkraftmikroskopie durch moderne Regelungstechnik und mechatronische Systemintegration. Elektrotech. Inftech. 129, 28–33 (2012). https://doi.org/10.1007/s00502-012-0070-8
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DOI: https://doi.org/10.1007/s00502-012-0070-8