Abstract
This study presents operational methods which improves tools control plan. To face challenges linked with quality, cost, cycle time, development and environment, semiconductors industries set classical process control methods. However many interactions between product-processes and tools are not exploited in practice for fine tuning controls operations and detecting premises of non conformities occurrences.
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Bassetto, S., Siadat, A. Operational methods for improving manufacturing control plans: case study in a semiconductor industry. J Intell Manuf 20, 55–65 (2009). https://doi.org/10.1007/s10845-008-0103-7
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DOI: https://doi.org/10.1007/s10845-008-0103-7