Abstract
Idle vehicle handling is addressed for the path-based automated material handling system (AMHS) in a semiconductor fabrication line. Since a typical semiconductor fabrication line has a single path in each bay and no sidetracks to park idle vehicles, a vehicle should be dispatched to somewhere if necessary even without a new assignment to prevent blocking of other vehicles. We investigate the continuous-move policy, the move-when-necessary policy and their variants. Our simulations show that the idle vehicle circulation policy significantly affects the AMHS productivity, so the policy should be carefully designed for the AMHS instance.
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Kim, BI., Park, J. Idle vehicle circulation policies in a semiconductor FAB. J Intell Manuf 20, 709–717 (2009). https://doi.org/10.1007/s10845-008-0159-4
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DOI: https://doi.org/10.1007/s10845-008-0159-4