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Robust Design of a Bimetallic Micro Thermal Sensor Using Taguchi Method

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Abstract

In this study, a performance optimization process for a bimetallic micro thermal sensor using the Taguchi quality engineering method is described. Sensor performance is obtained by simulating the theoretical model, which shows the effect of the beam deflection on capacitance during changes in temperature. Optimal parameter combinations are determined using Taguchi experimental design method with at least 90 % confidence level. The level of importance of the parameters on the sensor’s sensitivity is determined using the analysis of signal-to-noise ratio as well as analysis of variance. The improvement in S/N ratio is 29.47 dB, representing an increase of 29.74 times in sensitivity.

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Authors and Affiliations

  1. Center of Excellence on Soft Computing and Intelligent Information Processing, Department of Mechanical Engineering, Ferdowsi University of Mashhad, Mashhad, Iran

    Alireza Akbarzadeh

  2. Department of Mechanical Engineering, Ferdowsi University of Mashhad, Mashhad, Iran

    Shahriar Kouravand & Behnam Moetakef Imani

Authors
  1. Alireza Akbarzadeh
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  2. Shahriar Kouravand
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  3. Behnam Moetakef Imani
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Corresponding author

Correspondence to Shahriar Kouravand.

Additional information

Communicated by Felix L. Chernousko.

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Akbarzadeh, A., Kouravand, S. & Imani, B.M. Robust Design of a Bimetallic Micro Thermal Sensor Using Taguchi Method. J Optim Theory Appl 157, 188–198 (2013). https://doi.org/10.1007/s10957-012-0171-x

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  • DOI: https://doi.org/10.1007/s10957-012-0171-x

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