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A sub-region one-to-one mapping (SOM) detection algorithm for glass passivation parts wafer surface low-contrast texture defects

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Abstract

Glass Passivation Parts (GPP) wafer texture defects are one of the most important factors affecting the accuracy of wafer defect detection. Template matching has local errors and low efficiency, and deep learning requires many training samples. In the early stage, defect training sample sets cannot be provided. This paper discusses the design of an effective GPP wafer grain region texture defect detection algorithm using a sub-region one-to-one mapping. A set of standard wafer datum is selected as the reference of grain region segmentation detection, and then the standard wafer images and test GPP wafer images are automatically calibrated and segmented, respectively. Then, a series of pre-processes were performed to equalize the sizes of the two grain-region images. Then the grain region was divided into an equal number of rectangular sub-regions of the same size according to the measurement precision requirement. The correlation degree of each test sub-region is judged by the designed three-channel RGB gray-scale similarity decision functions. Experiments show that the algorithm successfully achieved the necessary calibration and segmentation for the grain region. Compared with the template and histogram matching algorithms, the proposed method does not require a training set, the detection accuracy is significantly improved and the detection efficiency is up to 29.74 times better on average using the proposed algorithm.

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Acknowledgements

this paper was supported by the National Key R&D Program of China (2017YFB1301203), National Natural Science Foundation of China (51775492), the Key R&D Program of Zhejiang Province (No. 2020C01026), and Robotics Institute of Zhejiang University (No. K11808 and K11811).

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Authors and Affiliations

  1. State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou, 310027, China

    Jin Wang, Zhiyong Yu, Zhizhao Duan & Guodong Lu

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  1. Jin Wang
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  2. Zhiyong Yu
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  3. Zhizhao Duan
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  4. Guodong Lu
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Correspondence to Jin Wang.

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Wang, J., Yu, Z., Duan, Z. et al. A sub-region one-to-one mapping (SOM) detection algorithm for glass passivation parts wafer surface low-contrast texture defects. Multimed Tools Appl 80, 28879–28896 (2021). https://doi.org/10.1007/s11042-021-11084-8

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