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MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator

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Abstract

This paper presents a MEMS gyroscope control system of using a high-order band-pass continuous-time sigma-delta modulator. Compared with a low-pass discrete-time sigma-delta modulator based solution, the band-pass modulator can considerably decrease the sampling frequency; moreover, the continuous-time architecture has an obvious advantage on PCB prototyping and shorter lead time of the implementation in hardware. System level simulations using MATLAB/Simulink show the proposed sixth order sigma-delta modulator can achieve a high SNR of 100 dB for an angular rate input with an amplitude of 200°/s and a frequency of 32 Hz. A PCB circuit implementation is simulated using Orcad/PSpice to analyze the stability, and implemented in hardware. Measurement of the power spectral density of the output bitstream reveals a noise floor of −90 dBV/Hz1/2. The prototype is tested on a rate table with an angular rate input, verifying that the principle of the approach of using an electro-mechanical band-pass sigma-delta modulator control system for a MEMS gyroscope.

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Authors and Affiliations

  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, 100871, China

    HaiTao Ding, ZhenChuan Yang & GuiZhen Yan

  2. School of Electronics and Computer Science, University of Southampton, Southampton, SO17 1BJ, UK

    HaiTao Ding & Michael Kraft

  3. North China Institute of Systems Engineering, Beijing, 100089, China

    HaiTao Ding & ZhanFei Wang

Authors
  1. HaiTao Ding
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  2. ZhenChuan Yang
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  3. ZhanFei Wang
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  4. Michael Kraft
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  5. GuiZhen Yan
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Correspondence to ZhenChuan Yang.

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Ding, H., Yang, Z., Wang, Z. et al. MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator. Sci. China Inf. Sci. 56, 1–10 (2013). https://doi.org/10.1007/s11432-012-4670-z

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  • DOI: https://doi.org/10.1007/s11432-012-4670-z

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