Abstract
Multi-electrode array is an important tool in the study of neural-network, cognition, remembrance, as well as brain-computer-interface, etc. Fork-like 32-site microelectrodes are developed with silicon. By use of integrated circuit technology, the length of the electrodes, the area of the recording sites, as well as the spaces between the sites are closely controlled. SiO2/SiNx/SiO2 composite dielectric membrane and Pt black are introduced to improve the characteristics of the electrodes. The whole thickness of the thin-film probe was 21 μm. By combining the modifying process with the micro-fabrication method, this kind of silicon based microelectrode satisfies high-density recording and the performance characterization is evaluated by test in vitro and in vivo.
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References
Regehr W G, Pine J, Rutledge D B. A long-term in vitro silicon-based microelectrode neuron connection. IEEE Trans Biomed Eng, 1988, 35: 1023–1031
Kovacs G T A, Storment C W, Halks-Miller M, et al. Silicon-substrate microelectrode arrays for parallel recording of neural activity in peripheral and cranial nerves. IEEE Trans Biomed Eng, 1994, 41: 567–576
Kipke D R, Vetter R J, Williams J C, et al. Silicon-substrate intracortical microelectrode arrays for long term recording of neuronal spike activity in cerebral cortex. IEEE Trans Neural Syst Reh Eng, 2003, 11: 151–155
Merriam S M E, Dehmel S, Onnop S, et al. A 3-D 160-site microelectrode array for cochlear nucleus mapping. IEEE Trans Biomed Eng, 2011, 58: 397–403
Wang Y, Pei W H, Guo K, et al. Dry electrode for the measurement of biopotential signals. Sci China Inf Sci, 2011, 54: 2435–2442
Fromherz P, Stett A. Silicon-neuron junction: capacitive stimulation of an individual neuron on a silicon chip. Phys Rev Lett, 1995, 75: 1670–1673
Ward M P, Rajdev P, Ellison C, et al. Toward a comparison of microelectrodes for acute and chronic recordings. Brain Res, 2009, 1282: 183–200
Hoogerwerf A C, Wise K D. A three-dimensional microelectrode array for chronic neural recording. IEEE Trans Biomed Eng, 1994, 41: 1136–1146
Marrese C A. Preparation of strongly adherent platinum black coatings. Anal Chem, 1987, 59: 217–218
Zhang X, Tu K N, Chen Z, et al. Pulse electroplating of copper film: a study of process and microstructure. J Nanosci Nanotechnol, 2008, 8: 2568–2574
Guo K, Pei W H, Li X Q, et al. Fabrication and characterization of implantable silicon neural probe with microfluidic channels. Sci China Tech Sci, 2012, 55: 1–5
Schmitt G, Schultze J W, Fassbender F, et al. Passivation and corrosion of microelectrode arrays. Electrochim Acta, 1999, 44: 3865–3883
Cao C N, Zhang J Q. An Introduction to Electrochemical Impedance Spectroscopy. Beijing: Science Press, 2002. 26–27
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Chen, S., Pei, W., Zhao, H. et al. 32-site microelectrode modified with Pt black for neural recording fabricated with thin-film silicon membrane. Sci. China Inf. Sci. 57, 1–7 (2014). https://doi.org/10.1007/s11432-013-4846-1
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DOI: https://doi.org/10.1007/s11432-013-4846-1