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Fabrication of InP-based monolithically integrated laser transmitters

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Abstract

InP-based photonic integrated circuits (PICs) have aroused great interest in recent years to meet the needs of future high-capacity and high-performance optical systems. With the advantages of small size, low power consumption, low cost, high reliability, InP-based PICs are promising solutions to replace the multiple discrete devices used in various systems. In this paper, we will review the design, fabrication, key integration technology and performance of several kinds of InP-based monolithically integrated transmitters developed in our group in recent years. Particular attention will be paid to the electro-absorption modulated laser (EML), multi-wavelength distributed feedback (DFB) laser arrays, widely tunable distributed reflector (DBR) lasers and their arrays, integrated amplified feedback lasers (AFL), and few-mode transmitters.

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Acknowledgements

The work was supported by National Natural Science Foundation of China (NSFC) (Grant Nos. 61635010, 61474112, 61574137, 61320106013, 61335009, 61321063, 61674134, 61274071), National Key Research and Development Program of China (Grant No. 2016YFB0402301), National High Technology Research and Development Program of China (863 Program) (Grant No. 2013AA014502), and National Basic Research Program of China (973 Program) (Grant No. 2014CB340102).

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Authors and Affiliations

  1. Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China

    Song Liang, Dan Lu, Lingjuan Zhao, Hongliang Zhu, Baojun Wang, Daibing Zhou & Wei Wang

  2. College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing, 100083, China

    Song Liang, Dan Lu, Lingjuan Zhao, Hongliang Zhu, Baojun Wang, Daibing Zhou & Wei Wang

  3. Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China

    Song Liang, Dan Lu, Lingjuan Zhao, Hongliang Zhu, Baojun Wang, Daibing Zhou & Wei Wang

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  1. Song Liang
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  2. Dan Lu
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  3. Lingjuan Zhao
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Correspondence to Song Liang or Lingjuan Zhao.

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Liang, S., Lu, D., Zhao, L. et al. Fabrication of InP-based monolithically integrated laser transmitters. Sci. China Inf. Sci. 61, 080405 (2018). https://doi.org/10.1007/s11432-018-9478-1

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