Skip to main content
SpringerLink
Log in

Analyzing electrostatic modulation of signal transduction efficiency in MoS2 nanoelectromechanical resonators with interferometric readout

  • Research Paper
  • Published:
Science China Information Sciences Aims and scope Submit manuscript

Abstract

Optical interferometry is a highly sensitive method for detecting the miniscule resonant motion in two-dimensional (2D) nanoelectromechanical systems (NEMS). However, the technique to control the interferometry signal strength has not been fully understood. In this work, we present analytical modeling of an effective method for tuning motion-to-signal responsivity in interferometric detection of 2D molybdenum disulfide (MoS2) NEMS resonators. We show that the responsivity can be tuned very efficiently, all the way from maximum to 0, by varying the vacuum gap underneath the 2D membrane electrostatically. We further show that the gate voltage corresponding to 0 responsivity, which means no motion signal can be detected, varies with the MoS2 thickness, diameter, pre-strain, and initial vacuum gap. Our findings provide an important guideline for optimizing measurement conditions when detecting motion in 2D NEMS structures using laser interferometry.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Kang H, Ruan B, Hao Y C, et al. Mode-localized accelerometer with ultrahigh sensitivity. Sci China Inf Sci, 2021. doi: https://doi.org/10.1007/s11432-020-3057-y

  2. Eichler A, Moser J, Chaste J, et al. Nonlinear damping in mechanical resonators made from carbon nanotubes and graphene. Nat Nanotech, 2011, 6: 339–342

    Article  Google Scholar 

  3. Jia R D, Chen L, Huang Q Q, et al. Complementary tunneling transistors based on WSe2/SnS2 van der Waals heterostructure. Sci China Inf Sci, 2020, 63: 149401

    Article  Google Scholar 

  4. Xu Y F, Li W S, Fan D X, et al. A compact model for transition metal dichalcogenide field effect transistors with effects of interface traps. Sci China Inf Sci, 2021, 64: 140408

    Article  Google Scholar 

  5. Morell N, Reserbat-Plantey A, Tsioutsios I, et al. High quality factor mechanical resonators based on WSe2 Monolayers. Nano Lett, 2016, 16: 5102–5108

    Article  Google Scholar 

  6. Ekinci K L, Yang Y T, Roukes M L. Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems. J Appl Phys, 2004, 95: 2682–2689

    Article  Google Scholar 

  7. Bunch J S, van der Zande A M, Verbridge S S, et al. Electromechanical resonators from graphene sheets. Science, 2007, 315: 490–493

    Article  Google Scholar 

  8. Chen C, Rosenblatt S, Bolotin K I, et al. Performance of monolayer graphene nanomechanical resonators with electrical readout. Nat Nanotech, 2009, 4: 861–867

    Article  Google Scholar 

  9. Zande A M, Barton R A, Alden J S, et al. Large-scale arrays of single-layer graphene resonators. Nano Lett, 2010, 10: 4869–4873

    Article  Google Scholar 

  10. Samanta C, Arora N, Vaidyuala K K, et al. The effect of strain on effective duffing nonlinearity in the CVD-MoS2 resonator. Nanoscale, 2019, 11: 8394–8401

    Article  Google Scholar 

  11. Yang R, Wang Z, Feng P X L. All-electrical readout of atomically-thin MoS2 nanoelectromechanical resonators in the VHF band. In: Proceedings of the 29th International Conference on Micro Electro Mechanical Systems (MEMS 2016), Shanghai, 2016. 59–62

  12. Yang R, Chen C, Lee J, et al. Local-gate electrical actuation, detection, and tuning of atomic-layer MoS2 nanoelectromechanical resonators. In: Proceedings of the 30th International Conference on Micro Electro Mechanical Systems (MEMS 2017), Las Vegas, 2017. 163–166

  13. Manzeli S, Dumcenco D, Marega G M, et al. Self-sensing, tunable monolayer MoS2 nanoelectromechanical resonators. Nat Commun, 2019, 10: 4831

    Article  Google Scholar 

  14. Xu Y, Chen C, Deshpande V V, et al. Radio frequency electrical transduction of graphene mechanical resonators. Appl Phys Lett, 2010, 97: 243111

    Article  Google Scholar 

  15. Chen C, Lee S, Deshpande V V, et al. Graphene mechanical oscillators with tunable frequency. Nat Nanotech, 2013, 8: 923–927

    Article  Google Scholar 

  16. Wang Z, Lee J, Feng P X L. Spatial mapping of multimode Brownian motions in high-frequency silicon carbide microdisk resonators. Nat Commun, 2014, 5: 5158

    Article  Google Scholar 

  17. Lee J, Wang Z, He K, et al. High frequency MoS2 nanomechanical resonators. ACS Nano, 2013, 7: 6086–6091

    Article  Google Scholar 

  18. Lee J, Wang Z, He K, et al. Electrically tunable single- and few-layer MoS2 nanoelectromechanical systems with broad dynamic range. Sci Adv, 2018, 4: eaao6653

    Article  Google Scholar 

  19. Dolleman R J, Davidovikj D, van der Zant H S J, et al. Amplitude calibration of 2D mechanical resonators by nonlinear optical transduction. Appl Phys Lett, 2017, 111: 253104

    Article  Google Scholar 

  20. Barton R A, Storch I R, Adiga V P, et al. Photothermal self-oscillation and laser cooling of graphene optomechanical systems. Nano Lett, 2012, 12: 4681–4686

    Article  Google Scholar 

  21. Yang R, Wang Z, Wang P, et al. Two-dimensional MoS2 nanomechanical resonators freely-suspended on microtrenches on flexible substrate. In: Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, 2015. 877–880

  22. Morell N, Tepsic S, Reserbat-Plantey A, et al. Optomechanical measurement of thermal transport in two-dimensional MoSe2 lattices. Nano Lett, 2019, 19: 3143–3150

    Article  Google Scholar 

  23. Kim S P, Yu J, van der Zande A M. Nano-electromechanical drumhead resonators from two-dimensional material bimorphs. Nano Lett, 2018, 18: 6686–6695

    Article  Google Scholar 

  24. Wang Z, Feng P X L. Interferometric motion detection in atomic layer 2D nanostructures: visualizing signal transduction efficiency and optimization pathways. Sci Rep, 2016, 6: 28923

    Article  Google Scholar 

  25. de Alba R, Wallin C B, Holland G, et al. Absolute deflection measurements in a micro- and nano-electromechanical Fabry-Perot interferometry system. J Appl Phys, 2019, 126: 014502

    Article  Google Scholar 

  26. Yang R, Islam A, Feng P X L. Electromechanical coupling and design considerations in single-layer MoS2 suspended-channel transistors and resonators. Nanoscale, 2015, 7: 19921–19929

    Article  Google Scholar 

  27. de Alba R, Massel F, Storch I R, et al. Tunable phonon-cavity coupling in graphene membranes. Nat Nanotech, 2016, 11: 741–746

    Article  Google Scholar 

  28. Schomburg W K. Introduction to Microsystem Design. New York: Springer, 2011

    Book  Google Scholar 

Download references

Acknowledgements

This work was supported by the Ministry of Science and Technology of the People’s Republic of China (Grant Nos. 2018YFE0115500, 2019YFE0120300), National Natural Science Foundation of China (Grant Nos. 62004026, 62004032), Science and Technology Department of Sichuan Province (Grant Nos. 2021JDTD0028, 2021YJ0517), Science and Technology Commission of Shanghai Municipality (STCSM) Natural Science Project General Program (Grant No. 21ZR1433800), and Shanghai Sailing Program (Grant No. 19YF1424900).

Author information

Author notes

  1. Zhu J K and Zhang P C have the same contribution to this work.

Authors and Affiliations

  1. Institute of Fundamental and Frontier Sciences, University of Electronic Science and Technology of China, Chengdu, 610054, China

    Jiankai Zhu & Zenghui Wang

  2. University of Michigan-Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, 200240, China

    Pengcheng Zhang & Rui Yang

Authors
  1. Jiankai Zhu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Pengcheng Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Rui Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Zenghui Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding authors

Correspondence to Rui Yang or Zenghui Wang.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zhu, J., Zhang, P., Yang, R. et al. Analyzing electrostatic modulation of signal transduction efficiency in MoS2 nanoelectromechanical resonators with interferometric readout. Sci. China Inf. Sci. 65, 122409 (2022). https://doi.org/10.1007/s11432-021-3297-x

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11432-021-3297-x

Keywords

Search

Navigation