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Low-loss wide-bandwidth planar transmission line with a laminated conductor

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Abstract

In this paper, the laminated conductor technology is first introduced to planar-integrated transmission lines. The laminated conductor is composed of multilayers of metal and insulator, which has a lower conductor loss than a solid conductor. Based on the silicon-based micro electromechanical system technology, a laminated coplanar waveguide (CPW) with wide bandwidth and low loss is proposed, which uses a laminated conductor for signal lines and grounds. A laminated CPW and its transition are designed, fabricated, and measured. The simulation results show that the laminated CPW with many insulator layers has a low conductor loss. The measurement results illustrate that the average insertion loss of the laminated CPW is 0.65 dB from DC to 40 GHz, which is 44.4% smaller than that of the solid CPW.

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Acknowledgements

This work was supported by National Natural Science Foundation of China (Grant No. 61831016) and Guangdong Provincial Key-Field Research Program (Grant No. 2018B010115001).

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Authors and Affiliations

  1. Key Laboratory of Ministry of Education of Design and Electromagnetic Compatibility of High-Speed Electronic Systems, Shanghai Jiao Tong University, Shanghai, 200240, China

    Ken Ning, Xiao-Chun Li, Yan Shao & Junfa Mao

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  1. Ken Ning
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  2. Xiao-Chun Li
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  3. Yan Shao
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  4. Junfa Mao
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Corresponding authors

Correspondence to Xiao-Chun Li or Yan Shao.

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Ning, K., Li, XC., Shao, Y. et al. Low-loss wide-bandwidth planar transmission line with a laminated conductor. Sci. China Inf. Sci. 66, 152304 (2023). https://doi.org/10.1007/s11432-022-3564-2

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  • DOI: https://doi.org/10.1007/s11432-022-3564-2

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