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Planar positioning stage for micro machining

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Abstract

The following article presents an approach for a novel positioning stage as basic component of a small machine tool. It is a parallelkinematic machine (BiGlide mechanism), which converts the linear motion of two linear axes into a planar motion. The novel features, which were identified to be crucial for the transition from conventional machine tools to small ones, are: compact and precise feed axes, backlash free motion transmission, and direct measurement of the tool-center-point position and the ability of additional fine positioning. The proposed implementations are: hydraulic feed units, dry slide bearings as rotational joints, highly precise radar sensors and active variable-length struts of the parallelkinematic machine. Some of the simulation results are presented along with measurements of a currently designed prototype.

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Acknowledgments

This paper is based on investigations of the collaborative research program SPP1476, which is kindly supported by the German Research Foundation (DFG).

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Authors and Affiliations

  1. Institute of Production Science (wbk), Karlsruhe Institute of Technology (KIT), Kaiserstrasse 12, 76131, Karlsruhe, Germany

    J. Bauer & J. Fleischer

  2. Institut für Technische Mechanik (itm), Karlsruhe Institute of Technology (KIT), Kaiserstrasse 10, 76131, Karlsruhe, Germany

    D. Kern & W. Seemann

  3. Institut für Hochfrequenztechnik und Elektronik (ihe), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany

    S. Ayhan, S. Scherr & T. Zwick

Authors
  1. J. Bauer
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  2. D. Kern
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  3. S. Ayhan
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  4. S. Scherr
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  5. J. Fleischer
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  6. W. Seemann
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  7. T. Zwick
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Correspondence to J. Bauer.

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Bauer, J., Kern, D., Ayhan, S. et al. Planar positioning stage for micro machining. Prod. Eng. Res. Devel. 7, 511–516 (2013). https://doi.org/10.1007/s11740-013-0474-2

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  • DOI: https://doi.org/10.1007/s11740-013-0474-2

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