Abstract
A four-channel spectrovideo camera was developed and applied to the measurement of spatially and spectrally resolved profiles of atomic and ionic emission in an inductively coupled plasma (ICP). Spatial distributions of argon and chromium atoms and iron ions in ICP were visualized successfully. The excitation temperature profiles of argon, chromium, and iron in ICP were also successfully constructed on the basis of the two-line method. The excitation temperature profiles obtained with a monochromator and the spectrovideo camera were in fairly good agreement.
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Abe H, Yoneda M, Fujiwara N (2008) Developments of plasma etching technology for fabricating semiconductor devices. Jpn J Appl Phys 47:1435–1455. doi:10.1143/JJAP.47.1435
Borkowska-Burnecka J, Lesniewicz A, Zymicki W (2006) Comparison of pneumatic and ultrasonic nebulizations in inductively coupled plasma atomic emission spectrometry—matrix effects and plasma parameters. Spectrochim Acta B 61:579–587.doi:10.1016/j.sab.2006.04.005
Boumans PWJM (ed) (1987) Inductively coupled plasma emission spectroscopy part 1 and 2. Wiley, New York
Engelhard C, Chan GCY, Gamez G, Buscher W, Hieftje GM (2008) Plasma diagnostic on a low-flow plasma for inductively coupled plasma optical emission spectrometry. Spectrochim Acta B 63:619–629. doi:10.1016/j.sab.2008.03.015
Grotti M, Lagomarsino C, Mermet JM (2006) Effect of operating conditions on excitation temperature and electron number density in axially-viewed ICP-OES with introduction of vapours or aerosols. J Anal At Spectrom 21:963–969. doi:10.1039/b602162j
Herrmann R, Alkemade CTJ, Gilbert, Jr P (1963) Chemical analysis by flame photometry. Interscience Publishers, New York
Hill SJ (ed) (1998) Inductively coupled plasma spectrometry and its application. Sheffield Academic Press, Sheffield
Kitagawa K, Holick G (1992) Deviation of the level populations of iron atoms and ions from the boltzmann distribution in an inductively coupled plasma. Part 1. Spatial and power dependences. J Anal At Spectrom 7:1207–1219. doi:10.1039/JA9920701207
Lehn S, Huang M, Wamer K, Gamez G, Hieftje G (2003) Spatially resolved ground-state number densities of calcium and strontium ion in an inductively coupled plasma in contact with an inductively coupled plasma mass spectrometry sampling interface. Spectrochim Acta B 58:1647–1662. doi:10.1016/S0584-8547(03)00140-X
Sengoku S, Wagatsuma K (2006) Comparative studies of spectrochemical characteristics between axial and radial observations in inductively coupled plasma optical emission spectrometry. Anal Sci 22:245–248. doi:10.2116/analsci.22.245
Sung Y, Lim H (2003) Plasma temperature measurement of a low-pressure inductively coupled plasma using spectroscopic methods. J Anal At Spectrom 18:897–901. doi:10.1039/b303191h
Tognoni E, Hidalgo A, Canals A, Cristoforetti G, Legnaioli S, Salvetti A, Palleschi V (2007) Combination of the ionic-to-atomic line intensity ratios from two test elements for the diagnostic of plasma temperature and electron number density in inductively coupled plasma atomic emission spectroscopy. Spectrochim Acta B 62:435–443. doi:10.1016/j.sab.2007.05.006
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Cui, Z., Kodama, K., Oyama, H. et al. Two-dimensional observation of excited atoms and ions and excitation temperature in inductively coupled plasma using newly developed four channel spectrovideo camera. J Vis 13, 89–96 (2010). https://doi.org/10.1007/s12650-009-0018-1
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DOI: https://doi.org/10.1007/s12650-009-0018-1