Skip to main content
Log in

Study and analysis of the piezoresistive accelerometer stability and improvement of their performances

  • Original Article
  • Published:
International Journal of System Assurance Engineering and Management Aims and scope Submit manuscript

Abstract

With the springing up of the MEMS industry, research on accelerometers is focused on miniaturization, integration, high reliability, and high resolution, and shares extensive application prospects in military and civil fields. The piezoresistive accelerometer is the first element of measurement which converts the vibratory movement into time domain electrical signal and this signal is converted to a frequency domain electrical signal. In this work, the piezoresistive accelerometer step and impulse responses are enhanced by using appropriate parameters (damping rate and frequency range). The proposed parameters provide stable and accurate accelerometer. Therefore, tests were conducted by computer simulation and the obtained results have showed the difference between the accelerometer with the proposed parameters and the accelerometer used in the experiment.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  • Benmoussaa N et al (2014) Design and modeling of a three-axis piezoresistive microelectronic accelerometer. Phys Procedia 55:106–112

    Article  Google Scholar 

  • Bhattacharyya TK, Roy AL (2014) MEMS piezoresistive accelerometers. In: Vinoy KJ, Ananthasuresh GK, Pratap R, Krupanidhi SB (eds) Micro and smart devices and systems. Springer, India, pp 19–34

  • Chaehoi A (2005) Conception et modélisation de MEMS monolithiques CMOS en technologie FSBM: application aux accéléromètres. PhD thesis in Electronics, Optronics and System, University of Montpellier II

  • Hsieh HS, Chang HC, Hu CF, Cheng CL, Fang W (2011) A novel stress isolation guard-ring design for the improvement of a three-axis piezoresistive accelerometer. J Micromech Microeng 21(10):105006

    Article  Google Scholar 

  • Juanting Z et al (2014) The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology. J Semicond 35(6):1–10

    Google Scholar 

  • Liu G, Zhang B, Zhang K (2009) Design and fabrication of a GaAs/Al0.4Ga0.6As microaccelerometer based on piezoresistive effect. J Phys: Conf Ser 152:012024

    Google Scholar 

  • Liu Y, Zhao Y, Tian B, Sun L, Yu Z, Jiang Z (2014) Analysis and design for piezoresistive accelerometer geometry considering sensitivity, resonant frequency and cross-axis sensitivity. Microsyst Technol 20:463–470

    Article  Google Scholar 

  • Roy AL, Bhattacharyya TK (2015) Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers. Microsyst Technol 21:55–63

    Article  Google Scholar 

  • Sankar AR, Das S, Lahiri SK (2009) Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer. Microsyst Technol 15:511–518

    Article  Google Scholar 

Download references

Acknowledgements

The author like to thank the Algerian General Direction of Research (DGRSDT) for their financial support.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Zine Ghemari.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ghemari, Z. Study and analysis of the piezoresistive accelerometer stability and improvement of their performances. Int J Syst Assur Eng Manag 8 (Suppl 2), 1520–1526 (2017). https://doi.org/10.1007/s13198-017-0622-8

Download citation

  • Received:

  • Revised:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s13198-017-0622-8

Keywords

Navigation