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1D-based defect detection in patterned TFT-LCD panels using characteristic fractal dimension and correlations

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Abstract

Thin film transistor-liquid crystal display (TFT-LCD) is a major technology for flat panel display used in a wide range of electronic devices. As the TFT-LCD panel becomes dense, small defects can only be observed at an extremely high resolution. For fast imaging of a large-sized TFT-LCD panel at a high resolution, a one-dimensional (1D) line scan system is demanded. A TFT-LCD panel image at a fine resolution presents very complicated repetitive patterns, which increases the difficulty of the defect detection task. In this paper, we propose a 1D self-comparison defect detection scheme that directly works on the 1D line images of a TFT-LCD panel. The proposed method first uses the fractal transformation to enhance the periodicity and regularity of a 1D gray-level line image, and then divides the resulting fractal signal into small segments, each of the length of the repeated period. By calculating each divided segment’s normalized cross correlation with its neighboring segments and comparing the resulting correlation value with a predetermined threshold, the segments containing a defect can be effectively identified. Since the proposed method does not require a reference template, it is invariant to changes in illumination and image translation. Experimental results on a number of microdefects in patterned TFT-LCD panel surfaces show that the proposed method can well detect various ill-defined defects and is computationally very efficient.

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References

  1. Chen, P.O., Chen, S.H., Su, F.C.: An effective method for evaluating the image-sticking effect of TFT-LCDs by interpretative modeling of optical measurement. Liq. Cryst. 27, 965–975 (2000)

    Article  Google Scholar 

  2. Chou, P.B., Rao, A.R., Sturzenbecker, M.C., Wu, F.Y., Brecher, V.H.: Automatic defect classification for semiconductor manufacturing. Mach. Vis. Appl. 9, 201–214 (1997)

    Article  Google Scholar 

  3. Hawthorne, J.: Electro-optics technology tests flat-panel displays. Laser Focus World 36, 271–276 (2000)

    Google Scholar 

  4. Katz, M.J., George, E.B.: Fractals and the analysis of growth paths. Bull. Math. Biol. 47, 273–286 (1985)

    MathSciNet  Google Scholar 

  5. Khalaj, B.H., Aghajan, H.K., Kailath, T.: Automated direct patterned wafer inspection. In: Proceedings of IEEE workshop on applications of computer vision, Palm Spring, CA, November 30–December 2, 1992, pp. 266–273

  6. Khalaj, B.H., Aghajan, H.K., Kailath, T.: Patterned wafer inspection by high resolution spectral estimation techniques. Mach. Vis. Appl. 7, 178–185 (1994)

    Article  Google Scholar 

  7. Lee, K.W., Kassim, A.A.: Automated estimation of misconvergence in color monitors. IEEE Trans. Consum. Electron. 50, 39–45 (2004)

    Article  Google Scholar 

  8. Lu, C.J., Tsai, D.M.: Defect inspection of patterned thin film transistor-liquid crystal display panels using a fast sub-image-based singular value decomposition. Int. J. Prod. Res. 42, 4331–4351 (2004)

    Article  MATH  Google Scholar 

  9. Maeda, S., Ono, M., Kubata, H., Nakatani, M.: Precise detection of short-circuit defects on TFT substrate by infrared image matching. Syst. Computers Jpn 30, 72–84 (1999)

    Article  Google Scholar 

  10. Nakashima, K.: Hybrid inspection system for LCD color filter panels. In: Proceedings of the 10th international conference on instrumentation and measurement technology, Hamamatsu, 10–12 May 1994, pp. 689–692

  11. Oh, J.H., Kwak, D.M., Lee, K.B., Song, Y.C., Choi, D.H., Park, K.H.: Line defect detection in TFT-LCD using directional filter bank and adaptive multilevel thresholding. Key Eng. Mater. 270–273, 233–238 (2004)

  12. Pratt, W.K., Hawthorne, J.A.: Machine vision methods for automatic defect detection in liquid crystal displays. Adv. Imaging 13, 52–54 (1998)

    Google Scholar 

  13. Rapp, P.E., Watanabe, T.A.A.: Nonlinear signal classification. Int. J. Bifurcat. Chaos 12, 1273–1293 (2002)

    Article  MATH  MathSciNet  Google Scholar 

  14. Sokolov, S.M., Treskunov, A.S.: Automatic vision system for final test of liquid crystal display. In: Proceedings of the IEEE international conference on robotics and automation, Nice, France, 12–14 May 1992, pp. 1578–1582

  15. Tsai, D.M., Chou, C.C.: A fast focus measure of video display inspection. Mach. Vis. Appl. 14, 192–196 (2003)

    Google Scholar 

  16. Tsai, D.M., Chuang, S.T., Tseng, Y.H.: One-dimensional-based automatic defect inspection of multiple patterned TFT-LCD panels using Fourier image reconstruction. Int. J. Prod. Res. 45, 1297–1321 (2007)

    Article  MATH  Google Scholar 

  17. Tsai, D.M., Hsieh, C.Y.: Automated surface inspection for directional textures. Image Vis. Comput. 18, 49–62 (1999)

    Article  Google Scholar 

  18. Xie, P., Guan, S.U.: A golden-template self-generating method for patterned wafer inspection. Mach. Vis. Appl. 12, 149–156 (2000)

    Article  Google Scholar 

  19. Zhang, Y., Zhang, J.: Fuzzy recognition of the defect of TFT-LCD. Proc. SPIE 5637, 233–240 (2005)

    Article  Google Scholar 

Download references

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Authors and Affiliations

  1. Department of Industrial Engineering and Management, Yuan-Ze University, 135 Yuan-Tung Road, Nei-Li, Tao-Yuan, Taiwan, Republic of China

    Du-Ming Tsai & Su-Ta Chuang

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  1. Du-Ming Tsai
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  2. Su-Ta Chuang
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Correspondence to Du-Ming Tsai.

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Tsai, DM., Chuang, ST. 1D-based defect detection in patterned TFT-LCD panels using characteristic fractal dimension and correlations. Machine Vision and Applications 20, 423–434 (2009). https://doi.org/10.1007/s00138-008-0136-0

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  • DOI: https://doi.org/10.1007/s00138-008-0136-0

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