Abstract
The photolithography cluster tool is typically the most expensive tool set utilized in the production of semiconductor wafers and is often selected as a fabricator bottleneck. Modeling such a tool as a serial processing cluster tool, we deduce measures of tool performance. Queueing models reveal that the mean cycle time in the presence of a Poisson arrival process is related to the parallelism inherent in the system configuration. As a consequence, the normalized mean cycle time behavior has a different form than that of the standard single server queue. The process time of a lot and the throughput are evaluated in the presence of disruptions common in practical manufacturing environments. For multiple products with different process rates, it is shown that the throughput is not influenced by the order in which the lots are sequenced.
Similar content being viewed by others
References
Butler K, Matthews J (2001) How differentiating between utilization of effective availability and utilization of effective capacity leads to a better understanding of performance metrics. 12th IEEE/SEMI advanced semiconductor manufacturing conference, pp 21–22
Connerney K, Martin D, Tomka R (2001) Determining the capacity components of different classes of multichamber tools. 12th IEEE/SEMI advanced semiconductor manufacturing conference, pp 29–32
Hermann JW, Chandrasekaran N, Conaghan BF, Nguyen MQ, Rublof GW, Shi RZ (2000) Evaluating the impact of process changes on cluster tool performance. IEEE Trans Semicond Manuf 13(2):181–192
International Technology Roadmap for Semiconductors (2005) http://public.itrs.net/
Joo YJ, Lee TE (2004) Virtual control—a virtual cluster tool for testing and verifying a cluster tool controller and a scheduler. IEEE Robot Autom Mag 11(3):33–49
Kim JH, Lee TE, Lee HY, Park DB (2003) Scheduling analysis of time-constrained dual-armed cluster tools. IEEE Trans Semicond Manuf 16(3):521–534
Kishimoto M, Ozawa K, Watanabe K, Martin D (2001) Optimized operations by extended X-factor theory including unit hours concept. IEEE Trans Semicond Manuf 14(3):187–195
Kleinrock L (1975) Queueing theory, vol 1: theory. John Wiley-Interscience, New York, NY
LeBaron HT, Hendrickson RA (2000) Using emulation to validate a cluster tool simulation model. Winter simulation conference, vol 2. pp 1417–1422
Lopez MJ, Wood SC (1998) Systems of multiple cluster tools: configuration and performance under perfect reliability. IEEE Trans Semicond Manuf 11(3):465–474
Lopez MJ, Wood SC (2003) Systems of multiple cluster tools: configuration, reliability and performance. IEEE Trans Semicond Manuf 16(2):170–178
Martin DP (1999) Capacity and cycle time throughput understanding system. 10th IEEE/SEMI advanced semiconductor manufacturing conference. pp 127–131
Martin DP (1999) Total operational efficiency (TOE). 10th IEEE/SEMI advanced semiconductor manufacturing conference. pp 37–41
Morrison JR, Bortnick BS, Martin DP (2006) Performance evaluation of serial photolithography clusters: queueing models, throughput and workload sequence. 17th IEEE/SEMI advanced semiconductor manufacturing conference. pp 44–49
Oh HL (1999) Reducing complexity of wafer flow to improve quality and throughput in a single-wafer cluster tool. 24th IEEE/CPMT electronics manufacturing technology symposium. pp 378–388
Perkinson TL, McLarty PK, Gyurcsik RS, Calvin III RS (1994) Single-wafer cluster tool performance: an analysis of throughput. IEEE Trans Semicond Manuf 7(3):369–373
Perkinson TL, Gyurcsik RS, McLarty PK (1996) Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput. IEEE Trans Semicond Manuf 9(3):384–400
Rostami S, Hamidzadeh B (2004) An optimal residency-aware scheduling technique for cluster tools with buffer module. IEEE Trans Semicond Manuf 17(1):68–73
Shikalgar ST, Fronckowiak D, MacNair EA (2003) Application of cluster tool modeling to a 300 mm fab simulation. Winter simulation conference, vol 2. pp 1394–1397
Srinivasan RS (1998) Modeling and performance analysis of cluster tools using Petri nets. IEEE Trans Semicond Manuf 11(3):394–403
Venkatesh S, Smith JS (2005) An evaluation of deadlock-handling strategies in semiconductor cluster tools. IEEE Trans Semicond Manuf 18(1):197–201
Venkatesh S, Davenport R, Foxhaven P, Nulman J (1997) A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots. IEEE Trans Semicond Manuf 10(4):418–424
Wood SC (1996) Simple performance models for integrated processing tools. IEEE Trans Semicond Manuf 9(3):320–328
Zuberek WM (2004) Cluster tools with chamber revisiting—modeling and analysis using timed Petri nets. IEEE Trans Semicond Manuf 17(3):333–344
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Morrison, J.R., Martin, D.P. Performance evaluation of photolithography cluster tools. OR Spectrum 29, 375–389 (2007). https://doi.org/10.1007/s00291-006-0061-4
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00291-006-0061-4