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Elastizitätsmodell eines keramischen Sensorstreifens bei longitudinaler Verformung

Elasticity model of a ceramic sensor substrate objected to longitudinal deformation

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Summary

An easy-to-use and physically meaningful analytical stress model is developed for a strip attached to a stiff substrate impressing tensile displacements to the strip. The model allows evaluating the non-linear stress and strain of the strip in view of a high-precision deformation sensor (e.g. strain gauge).

Zusammenfassung

Vorgestellt wird ein Modell zur Bestimmung der Verformung eines keramischen Messstreifens basierend auf den elastizitätstheoretischen Beziehungen für homogene Materialien. Der Sensorstreifen unterliegt einer oberflächlichen Verschiebung entlang einer Längsfläche. Dem Modell zufolge ist eine schichthöhenabhängige Verringerung der longitudinalen Verschiebung gegeben. Die Anwendung auf Dehnungsmessstreifen aus piezoresistivem Dickschichtmaterial veranschaulicht die Berechnungen.

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Authors and Affiliations

  1. Institut für Sensor- und Aktuatorsysteme, Abteilung für Angewandte Materialwissenschaften der Elektronik, Technische Universität Wien, Wien, Austria

    W. Gschohsmann & J. Nicolics

  2. University of California, Santa Cruz, CA

    E. Suhir

  3. University of Maryland, College Park, MD

    E. Suhir

  4. ERS Co., Los Altos, CA, USA

    E. Suhir

Authors
  1. W. Gschohsmann
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  2. J. Nicolics
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  3. E. Suhir
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Correspondence to J. Nicolics.

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Gschohsmann, W., Nicolics, J. & Suhir, E. Elastizitätsmodell eines keramischen Sensorstreifens bei longitudinaler Verformung. Elektrotech. Inftech. 127, 279–284 (2010). https://doi.org/10.1007/s00502-010-0775-5

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  • DOI: https://doi.org/10.1007/s00502-010-0775-5

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