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Combining statistical analysis and artificial neural network for classifying jobs and estimating the cycle times in wafer fabrication

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Abstract

Estimating the cycle time of a job is meaningful in many ways for managing a wafer fabrication factory (wafer fab). However, this estimation is not easy, due to the complexity and uncertainty of the wafer fabrication environment. Recently, a number of hybrid methods have been proposed to improve the accuracy of estimating the cycle time of a job. Most of these methods used job classification, especially pre-classification. Among these methods, several were based on post-classification and achieved even better performances. Such post-classification-based methods were improved in this study by considering the required parameter adjustment instead of the estimation error. Thus, it is possible to classify jobs into more than two categories at the same time. From the view of neurocomputing, this study established a systematic and effective procedure to divide the input examples to an artificial neural network into several parts that can be better handled by different artificial neural networks. A real case was also used to illustrate the applicability of the proposed methodology. The effectiveness of the proposed methodology over several existing methods has been confirmed by statistical tests.

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References

  1. Wein LM (1992) On the relationship between yield and cycle time in semiconductor wafer fabrication. IEEE Trans Semicond Manuf 5(2):156–158

    Article  MathSciNet  Google Scholar 

  2. Inoue T, Ishii Y, Igarashi K, Takagi H, Muneta T, Imaoka K (2006) Conveyer belt model to analyze cycle time conditions in a semiconductor manufacturing line. In: IEEE international symposium on semiconductor manufacturing conference proceedings, pp 74–77

  3. Johnson RT, Yang F, Ankenman BE, Nelson BL (2004) Nonlinear regression fits for simulated cycle time vs. throughput curves for semiconductor manufacturing. In: Proceedings of the 2004 winter simulation conference, vol 2, pp 1951–1955

  4. Chen T (2013) A systematic cycle time reduction procedure for enhancing the competitiveness and sustainability of a semiconductor manufacturer. Sustainability 5:4637–4652

    Article  Google Scholar 

  5. Raddon A, Rio Rancho NM, Grigsby B (1997) Throughput time forecasting model. In: 1997 IEEE/SEMI advanced semiconductor manufacturing conference, pp 430–433

  6. Sivakumar AI, Chong CS (2001) A simulation based analysis of cycle time distribution, and throughput in semiconductor backend manufacturing. Comput Ind 45(1):59–78

    Article  Google Scholar 

  7. Fronckowiak D, Peikert A, Nishinohara K (1996) Using discrete event simulation to analyze the impact of job priorities on cycle time in semiconductor manufacturing. In: Advanced semiconductor manufacturing conference and workshop 1996, pp 151–155

  8. Beeg T (2004) Wafer fab cycle forecast under changing loading situations. In: 2004 IEEE advanced semiconductor manufacturing conference, pp 339–343

  9. Chen T (2003) A fuzzy back propagation network for output time prediction in a wafer fab. Appl Soft Comput 2(3):211–222

    Article  Google Scholar 

  10. Tirkel I (2011) Cycle time prediction in wafer fabrication line by applying data mining methods. In: Proceedings of the 22nd annual IEEE/SEMI advanced semiconductor manufacturing conference (ASMC’11), p 5

  11. Pearn WL, Chung SL, Lai CM (2007) Due-date assignment for wafer fabrication under demand variate environment. IEEE Trans Semicond Manuf 20(2):165–175

    Article  Google Scholar 

  12. Chang P-C, Hsieh J-C, Liao TW (2001) A case-based reasoning approach for due date assignment in a wafer fabrication factory. In: Proceedings of the international conference on case-based reasoning (ICCBR 2001), Vancouver, British Columbia, Canada

  13. Chang P-C, Hsieh J-C (2003) A neural networks approach for due-date assignment in a wafer fabrication factory. Int J Ind Eng 10(1):55–61

    MathSciNet  Google Scholar 

  14. Chen T (2006) A hybrid SOM-BPN approach to lot output time prediction in a wafer fab. Neural Process Lett 24(3):271–288

    Article  Google Scholar 

  15. Chang PC, Liao TW (2006) Combing SOM and fuzzy rule base for flow time prediction in semiconductor manufacturing factory. Appl Soft Comput 6(2):198–206

    Article  Google Scholar 

  16. Chen T (2007) A hybrid look-ahead SOM-FBPN and FIR system for wafer lot output time prediction and achievability evaluation. Int J Adv Manuf Technol 35:575–586

    Article  Google Scholar 

  17. Chen T (2007) An intelligent hybrid system for wafer lot output time prediction. Adv Eng Inform 21:55–65

    Article  Google Scholar 

  18. Chen T (2007) Predicting wafer lot output time with a hybrid FCM-FBPN approach. IEEE Trans Syst Man Cybern B Cybern 37(4):784–793

    Article  Google Scholar 

  19. Chen T, Wu HC, Wang YC (2009) Fuzzy-neural approaches with example post-classification for estimating job cycle time in a wafer fab. Appl Soft Comput 9:1225–1231

    Article  Google Scholar 

  20. Chen T (2011) Job cycle time estimation in a wafer fabrication factory with a bi-directional classifying fuzzy-neural approach. Int J Adv Manuf Technol 56(9):1007–1018

    Article  Google Scholar 

  21. Little JDC (1961) A proof for the queuing formula: L = λW. Oper Res 9(3):383–387

    Article  MathSciNet  MATH  Google Scholar 

  22. Chen T, Wang YC (2013) An iterative procedure for optimizing the performance of the fuzzy-neural job cycle time estimation approach in a wafer fabrication factory. Math Probl Eng. Article ID 740478

  23. Benardos PG, Vosniakos GC (2002) Prediciton of surface roughness in CNC face milling using neural networks and Taguchi’s design of experiments. Robot Comput Integr Manuf 18(5–6):343–354

    Article  Google Scholar 

  24. Sukthomya W, Tannock J (2005) The optimization of neural network parameters using Taguchi’s design of experiments approach: an application in manufacturing process modeling. Neural Comput Appl 14(4):337–344

    Article  Google Scholar 

  25. Ranganathan A (2004). The Levenberg–Marquardt algorithm. http://www.scribd.com/doc/10093320/Levenberg-Marquardt-Algorithm

  26. Bonnans JF, Gilbert JC, Lemaréchal C, Sagastizábal CA (2006) Numerical optimization: theoretical and practical aspects. Springer, Berlin

    Google Scholar 

  27. Tesauro G (1995) Temporal difference learning and TD-Gammon. Commun ACM 38(3):58–68

    Article  Google Scholar 

  28. Hans Raj K, Sharma RS, Srivastava S, Patvardhan C (2000) Modeling of manufacturing processes with ANNs for intelligent manufacturing. Int J Mach Tools Manuf 40(6):851–868

    Article  Google Scholar 

  29. Firoze A, Arifin MS, Rahman RM (2013) Bangla user adaptive word speech recognition: approaches and comparisons. Int J Fuzzy Syst Appl 3(3):1–36

  30. Breiman L, Friedman JH, Olshen RA, Stone CJ (1984) Classification and regression trees. Wadsworth & Brooks/Cole Advanced Books & Software, Monterey

    MATH  Google Scholar 

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Acknowledgments

This work was supported by National Science Council of Taiwan.

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Correspondence to Toly Chen.

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Chen, T. Combining statistical analysis and artificial neural network for classifying jobs and estimating the cycle times in wafer fabrication. Neural Comput & Applic 26, 223–236 (2015). https://doi.org/10.1007/s00521-014-1739-1

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