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Study of an Electrical Setup for Capacitive MEMS Accelerometers Test and Calibration

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Abstract

This paper deals with the development of a fully electrical method to estimate the sensitivity of capacitive MEMS accelerometers in batch fabrication. The objectives are to test and calibrate them without the need of costly and time-consuming mechanical test equipments. Alternate electrical test measurements are introduced and two methods are evaluated. The first one is based on the analytical study of the relations between the electrical test parameters and the sensitivity. The second one is based on a regression analysis of these relations on a learning batch of sensors. Both are evaluated on a case study accelerometer with Monte Carlo simulations. Applying the methods for calibration shows that the dispersion of the sensitivity can be improved. Results show that the second method is more promising.

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Authors and Affiliations

  1. LIRMM, University of Montpellier / CNRS, Montpellier, France

    Norbert Dumas, Florence Azaïs, Frédérick Mailly & Pascal Nouet

Authors
  1. Norbert Dumas
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  2. Florence Azaïs
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  3. Frédérick Mailly
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  4. Pascal Nouet
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Correspondence to Norbert Dumas.

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Responsible Editor: K. Arabi

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Dumas, N., Azaïs, F., Mailly, F. et al. Study of an Electrical Setup for Capacitive MEMS Accelerometers Test and Calibration. J Electron Test 26, 111–125 (2010). https://doi.org/10.1007/s10836-009-5122-6

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  • DOI: https://doi.org/10.1007/s10836-009-5122-6

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