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A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations

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Abstract

In this paper, we discuss scheduling problems in semiconductor manufacturing. Starting from describing the manufacturing process, we identify typical scheduling problems found in semiconductor manufacturing systems. We describe batch scheduling problems, parallel machine scheduling problems, job shop scheduling problems, scheduling problems with auxiliary resources, multiple orders per job scheduling problems, and scheduling problems related to cluster tools. We also present important solution techniques that are used to solve these scheduling problems by means of specific examples, and report on known implementations. Finally, we summarize some of the challenges in scheduling semiconductor manufacturing operations.

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Authors and Affiliations

  1. Department of Mathematics and Computer Science, University of Hagen, 58097, Hagen, Germany

    Lars Mönch

  2. School of Computing, Informatics, and Decision Systems Engineering, Arizona State University, Tempe, AZ, 85287, USA

    John W. Fowler

  3. Department of Manufacturing Sciences and Logistics, Ecole des Mines de Saint-Etienne, 13541, Gardanne, France

    Stéphane Dauzère-Pérès

  4. Department of Industrial Engineering, Clemson University, Clemson, SC, 29634, USA

    Scott J. Mason

  5. Institute of Applied Computer Science, Dresden University of Technology, 01062, Dresden, Germany

    Oliver Rose

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Mönch, L., Fowler, J.W., Dauzère-Pérès, S. et al. A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations. J Sched 14, 583–599 (2011). https://doi.org/10.1007/s10951-010-0222-9

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  • DOI: https://doi.org/10.1007/s10951-010-0222-9

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