Skip to main content
SpringerLink
Log in

An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control

一种基于前馈耦合补偿和尺度收缩模糊控制的微机械陀螺

  • Research Paper
  • Published:
Science China Information Sciences Aims and scope Submit manuscript

Abstract

This paper proposes a novel electrical coupling suppressing and drive closed loop control method for a MEMS gyroscope with feed-forward coupling compensation (FCC) and scalable fuzzy control. Theoretical analysis of the novel method is described in detail, and it is very simple to realize. Experimental results demonstrate that the electrical anti-resonant peaks located at the amplitude-frequency and phase-frequency responses are both eliminated by FCC control, and the height of the amplitude resonant peak increases more than 24 dB over 1800 Hz span. In addition, the overshoot of the transient response with scalable fuzzy control is smaller than 5%, and the settling time is less than 15 ms. The stabilities of the resonant amplitude and phase of the drive-mode velocity with scalable fuzzy control are about 15 ppm and 11 ppm, respectively. The scale factor of the gyroscope is measured to be 33.98 mV/deg/s with nonlinearity about 0.08%. Furthermore, the bias instability of the gyroscope with wavelet analysis is improved to be about 6.3 deg/h from 25.2 deg/h of the gyroscope without wavelet analysis.

创新点

(1)提出了一种基于前馈耦合补偿的微机械陀螺电耦合抑制方法; (2)提出了基于尺度收缩模糊控制算法的闭环控制技术; (3)基于小波变换算法来抑制微机械陀螺噪声。

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Lee A, Ko H, Cho D I D, et al. Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope. Microelectronics J, 2008, 39: 1–6

    Article  Google Scholar 

  2. Acar C, Shkel A M. An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes. J Microelectromech Syst, 2005, 14: 520–528

    Article  Google Scholar 

  3. Alper S E, Akin T. A symmetric surface micro-machined gyroscope with decoupled oscillation modes. Sensors Actuat A Phys, 2002, 97–98: 347–358

    Article  Google Scholar 

  4. Weinberg M S, Kourepenis A. Error sources in in-plane silicon tuning-fork MEMS gyroscopes. J Microelectromech Syst, 2006, 15: 479–491

    Article  Google Scholar 

  5. Saukoski M, Aaltonen L, Halonen K A I, et al. Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes. IEEE Sensors J, 2007, 7: 1639–1652

    Article  Google Scholar 

  6. Guo Z Y, Liu X S, Yang Z C, et al. Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope. In: Proceedings of IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, 2010. 264–267

    Google Scholar 

  7. Cagdaser B, Jog A, Last M, et al. Capacitive sense feedback control for MEMS beam steering mirrors. In: Proceedings of Solid-State Sensor and Actuator Workshop, Hilton Head Island, 2004. 348–351

    Google Scholar 

  8. Acar C, Shkel A M. Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement. J Micromech Microeng, 2005, 15: 1092–1101

    Article  Google Scholar 

  9. Cui J, Guo Z Y, Yang Z C, et al. Electrical coupling suppressing for a microgyroscope using ascending frequency drive with 2-DOF PID controller. In: Proceedings of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), Beijing, 2011. 2002–2005

    Google Scholar 

  10. Cui J, Guo Z Y, Yang Z C, et al. Electrical coupling suppression and transient response improvement for a microgyroscope using ascending frequency drive with a 2-DOF PID controller. J Micromech Microeng, 2011, 21: 095020

    Article  Google Scholar 

  11. Trusov A A, Prikhodko I P, Rozelle D M, et al. 1 PPM precision self calibration of scale factor in MEMS Coriolis vibratory gyroscopes. In: Proceedings of Transducers & Eurosensors XXVII: the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona, 2013. 2531–2534

    Google Scholar 

  12. Woo J K, Cho J Y, Boyd C, et al. Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WABRG). In: Proceedings of the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, 2014. 20–23

    Google Scholar 

  13. Senkal D, Ng E J, Hong V, et al. Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating <20 ppm scale factor stability. In: Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015. 29–32

    Google Scholar 

  14. Xiao Q J, Li S Y, Chen W Y, et al. Fuzzy tuning PI control for initial levitation of micromachined electrostatically levitated gyroscope. Electron Lett, 2009, 45: 818–819

    Article  Google Scholar 

  15. Fei J T, Xin M Y. An adaptive fuzzy sliding mode controller for MEMS triaxial gyroscope with angular velocity estimation. Nonlinear Dyn, 2012, 70: 97–109

    Article  MathSciNet  Google Scholar 

  16. He C H, Zhao Q C, Huang Q W, et al. A MEMS vibratory gyroscope with real-time mode-matching and robust control for the sense mode. IEEE Sensors J, 2015, 15: 2069–2077

    Article  Google Scholar 

  17. Ding H T, Yang Z C, Zhang M L, et al. Experimental study on the footing effect for SOG structures using DRIE. J Semicond, 2008, 29: 1088–1093

    Google Scholar 

  18. Ding H T, Liu X S, Lin L T, et al. A High-resolution silicon-on-glass axis gyroscope operating at atmospheric pressure. IEEE Sensors J, 2010, 10: 1066–1074

    Article  Google Scholar 

  19. Liu Y X, He C H, Liu D C, et al. Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm. In: Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, 2013. 1145–1148

    Google Scholar 

  20. Liu D C, He C H, Zhao Q C, et al. Digital signal processing for a micromachined vibratory gyroscope based on a three dimensional adaptive filter demodulator. Measurement, 2014, 50: 198–202

    Article  Google Scholar 

  21. Li Z P, Fan Q J, Chang L M, et al. Improved wavelet threshold denoising method for MEMS gyroscope. In: Proceedings of the 11th IEEE International Conference on Control & Automation (ICCA), Taichung, 2014. 530–534

    Chapter  Google Scholar 

  22. Stebler Y, Guerrier S, Skaloud J, et al. Generalized method of wavelet moments for inertial navigation filter design. IEEE Trans Aerospace Electron Syst, 2014, 50: 2269–2283

    Article  Google Scholar 

Download references

Acknowledgements

This work was partially supported by National Natural Science Foundation of China (Grant Nos. 61434003, 51505089).

Author information

Authors and Affiliations

  1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Beijing, 100871, China

    Chunhua He, Jimeng Zhang, Qiancheng Zhao, Zhenchuan Yang, Dacheng Zhang & Guizhen Yan

  2. Science and Technology on Reliability Physics and Application of Electronic Component Laboratory, No.5 Electronics Research Institute of the Ministry of Industry and Information Technology, Guangzhou, 510610, China

    Chunhua He & Qinwen Huang

Authors
  1. Chunhua He
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jimeng Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Qiancheng Zhao
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Qinwen Huang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Zhenchuan Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Dacheng Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Guizhen Yan
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Qiancheng Zhao.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

He, C., Zhang, J., Zhao, Q. et al. An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control. Sci. China Inf. Sci. 60, 042402 (2017). https://doi.org/10.1007/s11432-015-0931-8

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11432-015-0931-8

Keywords

关键词

Search

Navigation