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Harmonic disturbance observer-based sliding mode control of MEMS gyroscopes

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Acknowledgements

This work was supported in part by Science, Technology and Innovation Commission of Shenzhen Municipality (Grant No. JCYJ20190806154612782), in part by Fundamental Research Funds for the Central Universities (Grant No. 3102019ZDHKY13), in part by Shaanxi Provincial Key Laboratory of Industrial Automation (Grant No. SLGPT2019KF01-11), in part by Innovation Foundation for Doctor Dissertation of Northwestern Polytechnical University (Grant No. CX201954).

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Authors and Affiliations

  1. Research and Development Institute of Northwestern Polytechnical University in Shenzhen, Shenzhen, 518057, China

    Rui Zhang, Bin Xu & Ting Yang

  2. School of Automation, Northwestern Polytechnical University, Xi’an, 710072, China

    Rui Zhang, Bin Xu & Ting Yang

  3. Department of Precision Instruments, Tsinghua University, Beijing, 100084, China

    Qi Wei

  4. Shaanxi Provincial Key Laboratory of Industrial Automation, Shaanxi University of Technology, Hanzhong, 723000, China

    Pengchao Zhang

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  1. Rui Zhang
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  2. Bin Xu
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  3. Qi Wei
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  4. Pengchao Zhang
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  5. Ting Yang
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Correspondence to Bin Xu.

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Zhang, R., Xu, B., Wei, Q. et al. Harmonic disturbance observer-based sliding mode control of MEMS gyroscopes. Sci. China Inf. Sci. 65, 139201 (2022). https://doi.org/10.1007/s11432-019-2841-9

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  • DOI: https://doi.org/10.1007/s11432-019-2841-9

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