Abstract
The work described here deals with the problems of modeling and simulation for MEMS devices. The eventual goal is to produce a top-down MEMS design system similar to today's powerful VLSI design systems. In this work a fixed fabrication process (MUMPS) and a fixed layout tool (L-Edit) are chosen. Thus our efforts are concentrated on reliable simulation of designs and eventual comparison with actual fabricated parts. The cantilever beam is chosen as an example of how extraction from a physical layout may be modeled and interfaced with various simulators.
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Gibson, D., Purdy, C. Extracting Behavioral Data from Physical Descriptions of MEMS for Simulation. The Journal of VLSI Signal Processing-Systems for Signal, Image, and Video Technology 22, 135–146 (1999). https://doi.org/10.1023/A:1008151424166
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DOI: https://doi.org/10.1023/A:1008151424166