Abstract
This paper addresses MEMS testing through a case study: a micromachined magnetic field sensor with on-chip electronics. The sensor element is based on a cantilever beam that is deflected by means of the Lorentz force. Embedded piezoresistors are used to detect strain in the cantilever beam and thus to detect the magnetic field. A test approach is presented for the whole system focussing on fault classification, on design for testability and on production test costs. Fault classification introduces several catastrophic and parametric faults on both mechanical and electrical elements. Simple and low-cost design for testability such as test point insertion is then discussed for test cost reduction and for fault coverage enhancement.
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References
K. Arabi and B. Kaminska, “Oscillation Built-In Self-Test (OBIST) Scheme for Functional and Structural Testing of Analog and Mixed-Signal Integrated Circuits,” in Proc. International Test Conference, 1997, pp. 786-795.
F. Azaïs, J-C. Bodin, M. Renovell, and Y. Bertrand, “DC Test Efficiency for Switched-Current Memory Cells,” in Proc. European Test Workshop, Cagliari, May 28-30, 1997.
Information is available on the World Wide Web at the following address: http://cmp.imag.fr.
J.M. Karam, B. Courtois, and J.M. Paret, “Microelectronics Compatible Manufacturing Techniques of Microsystems,” Mechatronics' 96.
A. Kolpekwar and R.D. Blanton, “Development of a MEMS Testing Methodology,” ITC 1997, Pittsburgh, p. 923.
A. Kolpekwar, R.D. Blanton, and D. Woodilla, “Failure Modes for Stiction in Surface-Micromachined MEMS,” ITC 98.
A. Kolpekwar, C. Kellen, and R.D. Blanton, “MEMS Fault Model Generation Using CARAMEL,” ITC 1998, Pittsburgh.
L. Latorre, Y. Bertrand, and P. Nouet, “On the Use of Test Structures for the Electromechanical Characterization of a CMOS Compatible MEMS Technology,” in Proc. IEEE 1998 Int. Conf. On Microelectronic Test Structures, March, 1998.
L. Latorre and P. Nouet, “A Complete Methodology for Electro-Mechanical Characterization of a CMOS Compatible MEMS Technology,” IEICE Transactions on Electronics, vol. E-82-C,no 4, pp. 582-588, April 1999.
L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq, and P. Nouet, “Design, Characterization and Modeling of a CMOS Magnetic Field Sensor,” DATE'99: Design, Automation and Test in Europe, Munich, Germany, March 9–12, 1999, pp. 239-243.
L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq, and P. Nouet, “Modeling and Design Optimization of a CMOS Compatible MEMS,” MSM'99: 2nd International Conference on Modeling and Simulation of Microsystems, San Juan, Puerto Rico, USA, April 19–21, 1999, pp. 620-623.
L. Latorre, P. Nouet, Y. Bertrand, P. Hazard, and F. Pressecq, “Characterization and Modeling of a CMOS-Compatible MEMS Technology,” Sensors and Actuators, vol. 74, pp. 143-147, 1999.
M. Lubaszewski, E.F. Cota, and B. Courtois, “Microsystems Testing: An Approach and Open Problems,” IEEE Design, Automation and Test in Europe Conference, Paris, France, 1998, pp. 23-26.
S. Mir, M. Lubaszewski, V. Kolarik, and B. Courtois, “Automatic Test Generation for Maximal Diagnosis of Linear Analog Circuits,” in Proc. European Design & Test Conf., 1996, pp. 254-258.
A. Castillejo, D. Veychard, S. Mir, J.M. Karam, and B. Courtois, “Failure Mechanisms and Fault Classes for CMOS-Compatible Microetectromechanical Systems,” ITC 98, TIMA Grenoble.
M. Ohletz, “Hybrid Built-In Self-Test (HBIST) for Mixed Analog/Digital Integrated Circuits,” in IEEE European Test Conference, Germany, 1991, pp. 307-316.
T. Olbrich and A. Richardson, “Design and Self-Test for Switched-Current Building Blocks,” IEEE Design & Test of Computers, vol. 13,no. 2, pp. 10-17, 1996.
T. Olbrich, A. Richardson, W. Vermeiren, and B. Straube, “Integrating Testability into Microsystems,” Microsystem Technologies, Springer-Verlag, 1997, pp. 72-79.
M. Renovell, F. Azaïs, and Y. Bertrand, “The Multi-Configuration: A DFT Technique for Analog Circuits,” in Proc. IEEE VLSI Testing Symposium (VTS' 96), Princeton, USA, Avril 1996, pp. 54-59.
G.W. Roberts and A.K. Lu, “Analog Signal Generation for Built-In Self-Test of Mixed-Signal Integrated Circuits,” Kluwer Academic Publishers, ISBN 0-7923-9564-6, 1995.
M. Soma, “A Design-For-Test Methodology for Active Analog Filters,” in Proc. Int. Test Conference, 1990, pp. 566-573.
W. Vermeiren, B. Straube, and A. Holubek, “Defect-Oriented Experiments in Fault Modeling and Fault Simulation of Microsystem Components,” IEEE European Design and Test Conference, Paris, March 1996, pp. 522-527.
L. Zimmermann, J. Ph. Ebersohl, F. Le Hung, J.P. Berry, F. Bailleu, P. Rey, B. Diem, S. Renard, and P. Caillat, “Airbag Application: A Microsystem Including a Silicon Capacitive Accelerometer, CMOS Switched-Capacitor Electronics and True Self-Test Capability,” Sensors and Actuators, vol. 46–47, pp. 190-195, 1995.
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Beroulle, V., Bertrand, Y., Latorre, L. et al. Test and Testability of a Monolithic MEMS for Magnetic Field Sensing. Journal of Electronic Testing 17, 439–450 (2001). https://doi.org/10.1023/A:1012759320563
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DOI: https://doi.org/10.1023/A:1012759320563