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conference paper

Design and modeling of a high-speed scanner for atomic force microscopy

Schitter, G.
•
Astrom, K. J.
•
DeMartini, B.
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2006
2006 American Control Conference
American Control Conference 2006

A new scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The lowest resonance frequency of this scanner is above 22 kHz. The X and Y scan ranges are 13 micrometers and the Z range is 4.3 micrometers. The focus of this contribution is on the vertical positioning direction of the scanner, being the crucial axis of motion with the highest bandwidth and precision requirements for gentle imaging with the atomic force microscope. A mathematical model of the scanner dynamics is presented that will enable more accurate topography measurements with the high-speed AFM system.

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Type
conference paper
DOI
10.1109/ACC.2006.1655406
Web of Science ID

WOS:000241666300083

Author(s)
Schitter, G.
•
Astrom, K. J.
•
DeMartini, B.
•
Fantner, G. E.  
•
Turner, K.
•
Thurner, P. J.
•
Hansma, P. K.
Date Issued

2006

Published in
2006 American Control Conference
Start page

502

End page

507

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LBNI  
Event nameEvent placeEvent date
American Control Conference 2006

Minneapolis, MN

JUN 14-16, 2006

Available on Infoscience
November 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/56745
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