An elliptic phase-shift algorithm for high speed three-dimensional profilometry

Fuqin Deng; Zhao Li; Jia Chen; Jiangwen Deng; Kenneth S. M. Fung; Edmund Y. Lam

doi:10.1117/12.2001417

6 March 2013 An elliptic phase-shift algorithm for high speed three-dimensional profilometry

Fuqin Deng, Zhao Li, Jia Chen, Jiangwen Deng, Kenneth S. M. Fung, Edmund Y. Lam

Proceedings Volume 8661, Image Processing: Machine Vision Applications VI; 86610S (2013) https://doi.org/10.1117/12.2001417
Event: IS&T/SPIE Electronic Imaging, 2013, Burlingame, California, United States

Abstract

A high throughput is often required in many machine vision systems, especially on the assembly line in the semiconductor industry. To develop a non-contact three-dimensional dense surface reconstruction system for real-time surface inspection and metrology applications, in this work, we project sinusoidal patterns onto the inspected objects and propose a high speed phase-shift algorithm. First, we use an illumination-reflectivity-focus (IRF) model to investigate the factors in image formation for phase-measuring profilometry. Second, by visualizing and analyzing the characteristic intensity locus projected onto the intensity space, we build a two-dimensional phase map to store the phase information for each point in the intensity space. Third, we develop an efficient elliptic phase-shift algorithm (E-PSA) for high speed surface profilometry. In this method, instead of calculating the time-consuming inverse trigonometric function, we only need to normalize the measured image intensities and then index the built two-dimensional phase map during real-time phase reconstruction. Finally, experimental results show that it is about two times faster than conventional phase-shift algorithm.

Citation Download Citation

Fuqin Deng, Zhao Li, Jia Chen, Jiangwen Deng, Kenneth S. M. Fung, and Edmund Y. Lam "An elliptic phase-shift algorithm for high speed three-dimensional profilometry", Proc. SPIE 8661, Image Processing: Machine Vision Applications VI, 86610S (6 March 2013); https://doi.org/10.1117/12.2001417

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