Chromatic confocal detection for high-speed microtopography measurements

Aiko K. Ruprecht; Klaus Koerner; Tobias F. Wiesendanger; Hans J. Tiziani; Wolfgang Osten

doi:10.1117/12.525658

16 April 2004 Chromatic confocal detection for high-speed microtopography measurements

Aiko K. Ruprecht, Klaus Koerner, Tobias F. Wiesendanger, Hans J. Tiziani, Wolfgang Osten

Proceedings Volume 5302, Three-Dimensional Image Capture and Applications VI; (2004) https://doi.org/10.1117/12.525658
Event: Electronic Imaging 2004, 2004, San Jose, California, United States

Abstract

The chromatic confocal approach enables the parallelization of the complete depth-scan of confocal topography measurements. Therefore, mechanical movement can be reduced or completely avoided and the measurement times shortened. Chromatic confocal point sensors are already commercially available but they need lateral scanning in x- and y-direction in order to measure surface topographies. We achieved a further parallelization in the x-direction by realizing a chromatic confocal line sensor using a line focus and a spectrometer. In a second setup, we realized an area measuring chromatic confocal microscope, which is capable of one-shot measurements without any mechanical scanning. The depth resolution of this setup can be improved by measuring in a small number of different heights. Additional information about the color distribution of the object is gained.

Citation Download Citation

Aiko K. Ruprecht, Klaus Koerner, Tobias F. Wiesendanger, Hans J. Tiziani, and Wolfgang Osten "Chromatic confocal detection for high-speed microtopography measurements", Proc. SPIE 5302, Three-Dimensional Image Capture and Applications VI, (16 April 2004); https://doi.org/10.1117/12.525658

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