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Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon

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Abstract

This paper examines the methodic error of a micromechanical pressure sensor with a secondary capacitive transducer, arising in the isotropic model of the elastic properties of a monocrystalline membrane used in engineering design and metrological calculations. We obtain solutions of the Germain–Lagrange equations for anisotropic and isotropic circular membranes, as well as compare the values of their deflections in the both cases. The analysis shows that, under some parameters of the membrane, the output error of the measured value corresponding to the isotropic approximation reaches 7% of the measured pressure values close to its upper limit in the linearity zone of the static characteristics and contributes significantly to the total error of the sensor. This error can be easily compensated by circuit design.

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Authors and Affiliations

  1. Saint Petersburg State University of Aerospace Instrumentation, St. Petersburg, Russia

    A. R. Bestugin, I. A. Kirshina, P. A. Okin & O. M. Filonov

Authors
  1. A. R. Bestugin
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  2. I. A. Kirshina
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  3. P. A. Okin
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  4. O. M. Filonov
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Corresponding author

Correspondence to I. A. Kirshina.

Additional information

Original Russian Text © A.R. Bestugin, I.A. Kirshina, P.A. Okin, O.M. Filonov, 2015, published in Datchiki i Sistemy, 2015, No. 2, pp. 11–14.

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Bestugin, A.R., Kirshina, I.A., Okin, P.A. et al. Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon. Autom Remote Control 76, 2249–2254 (2015). https://doi.org/10.1134/S0005117915120140

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  • DOI: https://doi.org/10.1134/S0005117915120140

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