Abstract
The paper considers protection of silicon tensoresistive sensing elements against overload. A detailed analysis is focused on silicon crystal modeling of sensing elements exposed to pressures exceeding the upper limit of measurements. The existing designs of sensing element membranes and possible configurations of locking elements are summarized. In conclusion, the design of a sensing element in a differential pressure sensor with two locking elements is proposed.
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Original Russian Text © K.A. Andreev, A.I. Vlasov, V.A. Shakhnov, 2014, published in Datchiki i Sistemy, 2014, No. 10, pp. 54–57.
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Andreev, K.A., Vlasov, A.I. & Shakhnov, V.A. Silicon pressure transmitters with overload protection. Autom Remote Control 77, 1281–1285 (2016). https://doi.org/10.1134/S0005117916070146
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DOI: https://doi.org/10.1134/S0005117916070146