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Methods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors

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Abstract

Based on the electrophysical models of electrical characteristics of MIS-capacitor sensors, we analyze the features of methods and tools for evaluating metrological characteristics of the sensors in general terms and using the example of hydrogen-sensitive sensor elements with Pd–SiO\(_2\)–Si structure. Recommendations are given on the choice of optimal circuit modes for determining the performance characteristics of the sensors of concentrations of hydrogen-containing gases and of gas analyzers for various purposes.

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Funding

This work was supported by the Russian Science Foundation, project no. 18-79-10230.

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Authors and Affiliations

  1. National Research Nuclear University MEPhI, Moscow, 115409, Russia

    B. I. Podlepetsky, N. N. Samotaev, M. O. Etrekova & A. V. Litvinov

Authors
  1. B. I. Podlepetsky
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  2. N. N. Samotaev
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  3. M. O. Etrekova
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  4. A. V. Litvinov
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Corresponding authors

Correspondence to B. I. Podlepetsky, N. N. Samotaev, M. O. Etrekova or A. V. Litvinov.

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Translated by V. Potapchouck

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Podlepetsky, B.I., Samotaev, N.N., Etrekova, M.O. et al. Methods and Tools for Evaluating the Characteristics of MIS-Capacitor Gas Sensors. Autom Remote Control 83, 1639–1651 (2022). https://doi.org/10.1134/S00051179220100162

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  • DOI: https://doi.org/10.1134/S00051179220100162

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