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Pattern Bifurcation in a Nonlocal Erosion Equation

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Abstract

This paper considers a periodic boundary value problem for a nonlinear partial differential equation with a deviating spatial variable. It is called the nonlocal erosion equation and was proposed as a model for the formation of dynamic patterns on the semiconductor surface. As is demonstrated below, the formation of a spatially inhomogeneous relief is a self-organization process. An inhomogeneous relief appears due to local bifurcations in the neighborhood of homogeneous equilibria when they change their stability. The analysis of this problem is based on modern methods of the theory of infinite-dimensional dynamic systems, including such branches as the theory of invariant manifolds, the apparatus of normal forms, and asymptotic methods for studying dynamic systems.

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REFERENCES

  1. Sigmund, P., Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets, Phys. Rev., 1969, vol. 184, no. 2, pp. 383–416.

    Article  ADS  CAS  Google Scholar 

  2. Yamamura, Y. and Shindo, S., An Empirical Formula for Angular Dependence of Sputtering Yields, Radiat. Effect., 1984, vol. 80, no. 1–2, pp. 57–72.

    Article  ADS  CAS  Google Scholar 

  3. Elst, K. and Vandervorst, W., Influence of the Composition of the Altered Layer on the Ripple Formation, J. Vacuum Sci. Tech. A, 1994, vol. 12, no. 2, pp. 3205–3216.

    Article  CAS  Google Scholar 

  4. Sigmund, P., A Mechanism of Surface Micro-Roughening by Ion Bombardment, J. Mater. Sci., 1973, vol. 8, no. 2, pp. 1545–1553.

    Article  ADS  CAS  Google Scholar 

  5. Smirnov, V.K., Kibalov, D.S., Lepshin, P.A., and Bachurin, V.I., The Influence of Topographic Irregularities on the Formation of Wavelike Microrelief on the Silicon Surface, Izv. Ross. Akad. Nauk. Ser. Fiz., 2000, vol. 64, no. 4, pp. 626–630.

    CAS  Google Scholar 

  6. Rudyi, A.S., Kulikov, A.N., and Metlitskaya, A.V., Self-organization of Nanostructures within the Spatially Nonlocal Model of Silicon Surface Erosion by Ion Bombardment, in Kremnievye nanostruktury. Fizika. Tekhnologiya. Modelirovanie (Silicon Nanostructures. Physics. Technology. Modeling), Rudakov, V.I., Ed., Yaroslavl: Indigo, 2014, pp. 8–57.

  7. Bradley, R.M. and Harper, M.E., Theory of Ripple Topography Induced by Ion Bombardment, J. Vacuum Sci. Tech. A, 1988, vol. 6, no. 4, pp. 2390–2395.

    Article  CAS  Google Scholar 

  8. Rudy, A.S. and Bachurin, V.I., Spatially Nonlocal Model of Surface Erosion by Ion Bombardment, Bull. Russ. Acad. Sci. Phys., 2008, vol. 72, pp. 586–591.

    Article  Google Scholar 

  9. Metlitskaya, A.V., Kulikov, A.N., and Rudy, A.S., Formation of the Wave Nanorelief at Surface Erosion by Ion Bombardment within the Bradley-Harper Model, Russ. Microelectron., 2013, vol. 42, pp. 238–245.

    Article  Google Scholar 

  10. Kulikov, A.N. and Kulikov, D.A., Nonlocal Model for the Formation of Ripple Topography Induced by Ion Bombardment. Nonhomogeneous Nanostructures, Matem. Mod., 2016, vol. 28, no. 3, pp. 33–50.

    Google Scholar 

  11. Rudyi, A.S., Kulikov, A.N., Kulikov, D.A., et al., High-mode Wave Reliefs in a Spatially Nonlocal Erosion Model, Russ. Microelectron., 2014, vol. 43, pp. 277–283.

    Article  Google Scholar 

  12. Kulikov, D.A. and Rudy, A.S., Formation of a Warped Nanomodular Surface under Ion Bombardment. A Nanoscale Model of Surface Erosion, Model. Anal. Inform. Sist., 2012, vol. 19, no. 5, pp. 40–49.

    Article  Google Scholar 

  13. Kulikov, D.A., Spatially Nonhomogeneous Dissipative Structures of a Periodic Boundary-Value Problem for a Nonlocal Erosion Equation, Nonlinear Oscillations, 2014, vol. 17, no. 1, pp. 72–86.

    Google Scholar 

  14. Kovaleva, A.M., Kulikov, A.N., and Kulikov, D.A., Stability and Bifurcations of Undulate Solutions for One Functional-Differential Equation, Izv. Inst. Mat. Inform. Udmurt. Gos. Univ., 2015, no. 2(46), pp. 60–68.

  15. Kovaleva, A.M. and Kulikov, D.A., Bifurcations of Spatially Inhomogeneous Solutions in Two Versions of the Nonlocal Erosion Equation, J. Math. Sci., 2020, vol. 248, no. 4, pp. 438–447.

    Article  Google Scholar 

  16. Kulikov, D.A., Inhomogeneous Dissipative Structures in the Problem ofNanoreliefFormation, Dynamical Systems, 2012, vol. 2 (30), no. 3–4, pp. 259–272.

  17. Sobolevskii, P.E., Equations of Parabolic Type in a Banach Space, Tr. Mosk. Mat. Obshch., 1961, vol. 10, pp. 297–350.

    MathSciNet  Google Scholar 

  18. Yakubov, S.Ya., Solvability of the Cauchy Problem for Abstract Quasilinear Second-Order Hyperbolic Equations and Their Applications, Tr. Mosk. Mat. Obshch., 1970, vol. 23, pp. 37–60.

    MathSciNet  Google Scholar 

  19. Sobolev, S.L., Nekotorye primeneniya funktsional’nogo analiza v matematicheskoi fizike (Some Applications of Functional Analysis in Mathematical Physics), Leningrad: Leningrad State University, 1950.

  20. Krein, S.G., Lineinye differentsial’nye uravneniya v banakhovom prostranstve (Linear Differential Equations in a Banach Space), Moscow: Nauka, 1977.

  21. Marsden, J.E. and McCracken, M., The Hopf Bifurcation and Its Applications, New York: Springer-Verlag, 1976.

    Book  Google Scholar 

  22. Kulikov, A.N., Inertial Invariant Manifolds of a Nonlinear Semigroup of Operators in a Hilbert Space, Proceedings of the All-Russian Scientific Conference “Differential Equations and Their Applications” Dedicated to the 85th Anniversary of Prof. M.T. Terekhin, Yesenin Ryazan State University, Ryazan, May 17–18, 2019, part 2, Itogi Nauki i Tekhniki. Ser. Sovrem. Mat. Pril. Temat. Obz., 2020, vol 186, Moscow: VINITI, pp. 57–66.

  23. Arnol’d, V.I., Dopolnitel’nye glavy obyknovennykh differentsial’nykh uravnenii (Additional Chapters of Ordinary Differential Equations), Moscow: Nauka, 1978.

  24. Akhmetzyanov, A.V., Kushner, A.G., and Lychagin, V.V., Attractors in Models of Porous Media Flow, Doklady Mathematics, 2017, vol. 95, no. 1, pp. 72–75.

    Article  MathSciNet  Google Scholar 

  25. Kushner, A., Lychagin, V., and Rubtsov, V., Contact Geometry and Non-linear Differential Equations, Cambridge: Cambridge Univ. Press, 2007.

    Google Scholar 

  26. Kulikov, A.N. and Kulikov, D.A., A Possibility of Realizing the Landau-Hopf Scenario in the Problem of Tube Oscillations under the Action of a Fluid Flow, Theor. Math. Phys., 2020, vol. 203, pp. 501–511.

    Article  MathSciNet  Google Scholar 

  27. Kulikov, A.N. and Kulikov, D.A., Invariant Varieties of the Periodic Boundary Value Problem of the Nonlocal Ginzburg–Landau Equation, Math. Meth. Appl. Sci., 2021, vol. 44, no. 3, pp. 11985–11997.

    Article  MathSciNet  Google Scholar 

  28. Kulikov, A.N. and Kulikov, D.A., Invariant Manifolds and Global Attractor of the Ginzburg–Landau Integro-Differential Equation, Diff. Equat., 2022, vol. 58, pp. 1499–1513.

    Article  MathSciNet  Google Scholar 

  29. Kulikov, A.N. and Kulikov, D.A., Invariant Manifolds of a Weakly Dissipative Version of the Nonlocal Ginzburg-Landau Equation, Autom. Remote Control, 2021, vol. 82, no. 2, pp. 264–277.

    Article  MathSciNet  Google Scholar 

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Correspondence to D. A. Kulikov.

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This paper was recommended for publication by A.G. Kushner, a member of the Editorial Board

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Kulikov, D.A. Pattern Bifurcation in a Nonlocal Erosion Equation. Autom Remote Control 84, 1161–1174 (2023). https://doi.org/10.1134/S000511792311005X

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  • DOI: https://doi.org/10.1134/S000511792311005X

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