Abstract
We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.
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Project supported by the National Science and Technology Major Project, China (No. 2009ZX02202005)
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Fang, C., Xiang, Y. & Qi, Kq. A general method of designing phase-shifting algorithms for grating lateral shearing interferometry. Frontiers Inf Technol Electronic Eng 19, 809–814 (2018). https://doi.org/10.1631/FITEE.1601692
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DOI: https://doi.org/10.1631/FITEE.1601692