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Evolutionary computation applied to the tuning of MEMS gyroscopes

Published: 25 June 2005 Publication History

Abstract

We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation.

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Y. Chen, R. M'Closkey, T. Tran and B. Blaes. "A control and signal processing integrated circuit for the JPL-Boeing micromachined gyroscopes" (submitted to IEEE)
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R. J. Terrile, et al., "Evolutionary Computation Technologies for Space Systems", in Proceedings of the IEEE Aerospace Conference, Big Sky, March 2005
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D. Yuret, M. de la Maza, "Dynamic Hill Climbing - Overcoming limitations of optimization teqniques", AI Laboratory, MIT, Cambridge, MA 02139, USA
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K. Hayworth, "Continuous Tuning and Calibration of Vibratory Gyroscopes", In NASA Tech Brief, Oct 2003 (NPO-30449)
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M.I. Ferguson et al. "A Hardware Platform for Tuning of MEMS Devices Using Closed-Loop Frequency Response", IEEE Aerospace 2005, Big Sky, March 2005.
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Cited By

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  • (2020)Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithmMicrosystems & Nanoengineering10.1038/s41378-020-00214-16:1Online publication date: 30-Nov-2020
  • (2019)A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching ControlMicromachines10.3390/mi1008049610:8(496)Online publication date: 25-Jul-2019
  • (2013)A Slot-Structure MEMS Gyroscope Working at Atmosphere With Tunable Electrostatic Spring ConstantJournal of Microelectromechanical Systems10.1109/JMEMS.2013.225048522:4(909-918)Online publication date: Aug-2013
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    cover image ACM Conferences
    GECCO '05: Proceedings of the 7th annual conference on Genetic and evolutionary computation
    June 2005
    2272 pages
    ISBN:1595930108
    DOI:10.1145/1068009
    Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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    Publication History

    Published: 25 June 2005

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    Author Tags

    1. MEMS
    2. dynamic hill climbing
    3. evolvable hardware
    4. genetic algorithms
    5. gyroscope
    6. simulated annealing

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    View all
    • (2020)Design of freeform geometries in a MEMS accelerometer with a mechanical motion preamplifier based on a genetic algorithmMicrosystems & Nanoengineering10.1038/s41378-020-00214-16:1Online publication date: 30-Nov-2020
    • (2019)A Digital Calibration Technique of MEMS Gyroscope for Closed-Loop Mode-Matching ControlMicromachines10.3390/mi1008049610:8(496)Online publication date: 25-Jul-2019
    • (2013)A Slot-Structure MEMS Gyroscope Working at Atmosphere With Tunable Electrostatic Spring ConstantJournal of Microelectromechanical Systems10.1109/JMEMS.2013.225048522:4(909-918)Online publication date: Aug-2013
    • (2009)A Sub-0.2$^{\circ}/$hr Bias Drift Micromechanical Silicon Gyroscope With Automatic CMOS Mode-MatchingIEEE Journal of Solid-State Circuits10.1109/JSSC.2009.201699644:5(1593-1608)Online publication date: May-2009
    • (2008)A 0.1°/HR bias drift electronically matched tuning fork microgyroscope2008 IEEE 21st International Conference on Micro Electro Mechanical Systems10.1109/MEMSYS.2008.4443579(6-9)Online publication date: Jan-2008
    • (2007)A 0.2°/hr Micro-Gyroscope with Automatic CMOS Mode Matching2007 IEEE International Solid-State Circuits Conference. Digest of Technical Papers10.1109/ISSCC.2007.373456(386-610)Online publication date: Feb-2007

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