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An up-stream design auto-fix flow for manufacturability enhancement

Published: 24 July 2006 Publication History

Abstract

Although many physical limitations have been reached in modern micro-lithography, printed critical dimensions continue to shrink according to the International Technology Roadmap for Semiconductors (ITRS) [1]. To meet the demands imposed by this guideline, the traditional separation between design and manufacturing communities is being bridged. Many EDA tools package manufacturing data for delivery into established simulation engines for design verification. However, none of them provide practical implementations of design optimizations at an early stage in the design flow.This paper presents an automated layout modification flow for metal layers with the goal of enhancing manufacturability. It can easily be deployed in a current custom design flow in a way that is visible to designers. The result of this scheme is improvements to process windows and yield, while minimizing circuit performance detractors. The flow is verified through analyses of both the impact on circuit performance and the benefit to manufacturability. It has been implemented in a state-of-the-art 65 nm chip design. Both silicon yield and electrical performance data are currently being collected and analyzed.

References

[1]
International Technology Roadmap for Semiconductors, 2004 update. http://public.itrs.net/.
[2]
Chris Spence, "Mask Data Preparation Issues for the 90nm Node: OPC Becomes a Critical Manufacturing Technology", Future Fab Intl. Volume 16, 2004, pp. 77--79.
[3]
S. R. Nassif, "Modeling and Forecasting of Manufacturing Variations", Proc. Fifth International Workshop on Statistical Metrology, 2000, pp. 3--10.
[4]
M. Orshansky, et al., "Characterization of Spatial Intrafield Gate CD Variability, Its Impact on Circuit Performance, and Spatial Mask-Level Correction", IEEE Transactions on Semiconductor Manufacturing, 17(1), 2004, pp. 2--11.
[5]
A. B. Agrawal, et al., "Statistical timing analysis using bounds and selective enumeration", Proc. Design Automation Conference, 2003, pp. 348--353.
[6]
M. Orshansky et al., "A General Probabilistic Framework for Worst Case Timing Analysis", Proc. Design Automation Conference, 2002, pp. 556--561.
[7]
J. Yang, et al., "Advanced timing analysis based on post-OPC extraction of critical dimensions", ACM/IEEE Design Automation Conference, 2005, pp. 359--364, 2005.
[8]
L. Capodieci, et al., "Toward a methodology for manufacturability-driven design rule exploration", IEEE/ACM Design Automation Conference, 2004, pp. 311--316.

Cited By

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  • (2013)DfM at 28 nm and BeyondDesign for Manufacturability10.1007/978-1-4614-1761-3_3(103-203)Online publication date: 11-Aug-2013
  • (2007)Concurrent wire spreading, widening, and fillingProceedings of the 44th annual Design Automation Conference10.1145/1278480.1278569(350-353)Online publication date: 4-Jun-2007

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cover image ACM Conferences
DAC '06: Proceedings of the 43rd annual Design Automation Conference
July 2006
1166 pages
ISBN:1595933816
DOI:10.1145/1146909
Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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Association for Computing Machinery

New York, NY, United States

Publication History

Published: 24 July 2006

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Author Tags

  1. DFM
  2. OPC
  3. design flow
  4. layout

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DAC06
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DAC06: The 43rd Annual Design Automation Conference 2006
July 24 - 28, 2006
CA, San Francisco, USA

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Overall Acceptance Rate 1,770 of 5,499 submissions, 32%

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Cited By

View all
  • (2013)DfM at 28 nm and BeyondDesign for Manufacturability10.1007/978-1-4614-1761-3_3(103-203)Online publication date: 11-Aug-2013
  • (2007)Concurrent wire spreading, widening, and fillingProceedings of the 44th annual Design Automation Conference10.1145/1278480.1278569(350-353)Online publication date: 4-Jun-2007

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