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An efficient resistance sensitivity extraction algorithm for conductors of arbitrary shapes

Published: 26 July 2009 Publication History

Abstract

Due to technology scaling, integrated circuit manufacturing techniques are producing structures with large variabilities in their dimensions. To guarantee high yield, the manufactured structures must have the proper electrical characteristics despite such geometrical variations. For a designer, this means extracting the electrical characteristics of a whole family of structure realizations in order to guarantee that they all satisfy the required electrical characteristics. Sensitivity extraction provides an efficient algorithm to extract all realizations concurrently. This paper presents a complete framework for efficient resistance sensitivity extraction. The framework is based on both the Finite Element Method (FEM) for resistance extraction and the adjoint method for sensitivity analysis. FEM enables the calculation of resistances of interconnects of arbitrary shapes, while the adjoint method enables sensitivity calculation in a computational complexity that is independent of the number of varying parameters. The accuracy and efficiency of the algorithm are demonstrated on a variety of complex examples.

References

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A. Vithayathil, X. Hu, and J. White, "Substrate Resistance Extraction using a Multi-Domain Surface Integral Formulation" International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2003, pp. 323--326.
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X. Wang, W. Yu, and Z. Wang, "Efficient Direct Boundary Element Method for Resistance Extraction of Substrate With Arbitrary Doping Profile" IEEE Trans. on Computer-Aided Design of Integrated Circuits and Systems, Vol. 25, Issue 12, Dec. 2006, pp. 3035--3042.
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Cited By

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  • (2012)Efficient variation-aware EM-semiconductor coupled solver for the TSV structures in 3D ICProceedings of the Conference on Design, Automation and Test in Europe10.5555/2492708.2493053(1409-1412)Online publication date: 12-Mar-2012
  • (2012)Efficient variation-aware EM-semiconductor coupled solver for the TSV structures in 3D IC2012 Design, Automation & Test in Europe Conference & Exhibition (DATE)10.1109/DATE.2012.6176583(1409-1412)Online publication date: Mar-2012
  • (2011)Fast statistical analysis of RC nets subject to manufacturing variabilities2011 Design, Automation & Test in Europe10.1109/DATE.2011.5763012(1-6)Online publication date: Mar-2011
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  1. An efficient resistance sensitivity extraction algorithm for conductors of arbitrary shapes

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    cover image ACM Conferences
    DAC '09: Proceedings of the 46th Annual Design Automation Conference
    July 2009
    994 pages
    ISBN:9781605584973
    DOI:10.1145/1629911
    Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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    Publication History

    Published: 26 July 2009

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    Author Tags

    1. adjoint method
    2. finite-element method
    3. resistance extraction
    4. sensitivity
    5. shape variations

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    DAC '09: The 46th Annual Design Automation Conference 2009
    July 26 - 31, 2009
    California, San Francisco

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    Overall Acceptance Rate 1,770 of 5,499 submissions, 32%

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    View all
    • (2012)Efficient variation-aware EM-semiconductor coupled solver for the TSV structures in 3D ICProceedings of the Conference on Design, Automation and Test in Europe10.5555/2492708.2493053(1409-1412)Online publication date: 12-Mar-2012
    • (2012)Efficient variation-aware EM-semiconductor coupled solver for the TSV structures in 3D IC2012 Design, Automation & Test in Europe Conference & Exhibition (DATE)10.1109/DATE.2012.6176583(1409-1412)Online publication date: Mar-2012
    • (2011)Fast statistical analysis of RC nets subject to manufacturing variabilities2011 Design, Automation & Test in Europe10.1109/DATE.2011.5763012(1-6)Online publication date: Mar-2011
    • (2011)Enhanced sensitivity computation for BEM based capacitance extraction using the Schur complement technique2011 IEEE Custom Integrated Circuits Conference (CICC)10.1109/CICC.2011.6055331(1-4)Online publication date: Sep-2011
    • (2010)3POrProceedings of the International Conference on Computer-Aided Design10.5555/2133429.2133543(536-542)Online publication date: 7-Nov-2010

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