skip to main content
10.1145/1973009.1973081acmconferencesArticle/Chapter ViewAbstractPublication PagesglsvlsiConference Proceedingsconference-collections
poster

High resolution MASH 2-2 Sigma Delta interface for capacitive accelerometers

Published: 02 May 2011 Publication History

Abstract

This paper describes the design of fourth order MASH ΣΔ interface for MEMS capacitive accelerometers which is capable of converting change in differential capacitance to a digital output. It employs a switched capacitor (SC) charge amplifier as front end block with open loop gain of 120dB and total integrated noise of 4.5µV from dc to 10 kHz and a switched capacitor 2-2 multi stage noise shaping (MASH) sigma delta modulator as a back end block. Circuit simulations show that the interface system can achieve SNDR of 100dB in the signal band which is equivalent to capacitive resolution of 10aF for nominal capacitance ranging from 1pF to 10pF.

References

[1]
M. Lemkin and B. E. Boser, "A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics," IEEE Journal of Solid-State Circuits, vol. 34, pp. 456--468, April 1999.
[2]
B.V. Amini and F. Ayazi, "A 2.5V 14-bit Sigma-Delta CMOS-SOI Capacitive Accelerometer," IEEE Journal of Solid State Circuits, Dec. 2004, pp. 2467--2476.
[3]
V. Petkov and B. Boser, "A fourth-order interface for micromachined inertial sensors," IEEE J. Solid-State Circuits, vol. 40, no. 8, pp. 1602--1609, Aug 2005.
[4]
N. Wongkomet, B.E. Boser, "Correleted double sampling in capacitive position sensing circuits for micromachined applications," IEEE APCCAS. 1998.
[5]
F. Medeiro, B. Prez-Verdu, A. Rodriguez-Vizuez, "Top-Down. Design of High-Performance Sigma-Delta Modulatos", Kluver. Academic Publishers, 1999
[6]
Navid Yazdi, Haluk kulah, khalil Najafi, "Precision readout circuits for capacitive microaccelerometers," proc. of IEEE Sensors.,2004.
[7]
Babak vakili Amini, Saivash Pourkamali, Mohammad zaman, Farok Aayzi, "A new input switching scheme for Capacitive micro-g accelerometers", Symposium on VLSI circuits digest of technical papers. 2004.

Cited By

View all
  • (2011)Design of feed-forward ΣΔ interface for MEMS based accelerometers2011 4th International Congress on Image and Signal Processing10.1109/CISP.2011.6100617(2153-2158)Online publication date: Oct-2011

Index Terms

  1. High resolution MASH 2-2 Sigma Delta interface for capacitive accelerometers

    Recommendations

    Comments

    Information & Contributors

    Information

    Published In

    cover image ACM Conferences
    GLSVLSI '11: Proceedings of the 21st edition of the great lakes symposium on Great lakes symposium on VLSI
    May 2011
    496 pages
    ISBN:9781450306676
    DOI:10.1145/1973009
    Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

    Sponsors

    In-Cooperation

    • IEEE CEDA
    • IEEE CASS

    Publisher

    Association for Computing Machinery

    New York, NY, United States

    Publication History

    Published: 02 May 2011

    Permissions

    Request permissions for this article.

    Check for updates

    Author Tags

    1. capacitance measurement
    2. mash

    Qualifiers

    • Poster

    Conference

    GLSVLSI '11
    Sponsor:
    GLSVLSI '11: Great Lakes Symposium on VLSI 2011
    May 2 - 4, 2011
    Lausanne, Switzerland

    Acceptance Rates

    Overall Acceptance Rate 312 of 1,156 submissions, 27%

    Upcoming Conference

    GLSVLSI '25
    Great Lakes Symposium on VLSI 2025
    June 30 - July 2, 2025
    New Orleans , LA , USA

    Contributors

    Other Metrics

    Bibliometrics & Citations

    Bibliometrics

    Article Metrics

    • Downloads (Last 12 months)3
    • Downloads (Last 6 weeks)0
    Reflects downloads up to 20 Feb 2025

    Other Metrics

    Citations

    Cited By

    View all
    • (2011)Design of feed-forward ΣΔ interface for MEMS based accelerometers2011 4th International Congress on Image and Signal Processing10.1109/CISP.2011.6100617(2153-2158)Online publication date: Oct-2011

    View Options

    Login options

    View options

    PDF

    View or Download as a PDF file.

    PDF

    eReader

    View online with eReader.

    eReader

    Figures

    Tables

    Media

    Share

    Share

    Share this Publication link

    Share on social media