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MEMS technology for RF passive components

Published: 26 October 2011 Publication History

Abstract

In this work a wide overview on the exploitation of MEMS technology (MicroElectroMechanical-Systems) for Radio Frequency (i.e. RF-MEMS) and telecommunication systems is provided. In the last 10-15 years MEMS technology proved to be a valuable solution for the realization of passive components for RF circuits, like variable capacitors (i.e. varactors), inductors, switches (i.e. micro-relays), as well as more complex networks, like RF filters, impedance matching tuners etc., with remarkable characteristics in terms of low-loss, high Q-factor (quality factor), and large reconfigurability. The integration within RF circuits and platforms, of passive lumped elements and networks with such prominent characteristics, would lead to a significant increase of performance and reconfigurability of the whole system (e.g. mobile handset, satellite, radar, and so on).

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Cited By

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  • (2013)Design and analysis of RF MEMS Varactor for extended tuning range2013 International Conference on Control, Computing, Communication and Materials (ICCCCM)10.1109/ICCCCM.2013.6648915(1-4)Online publication date: Aug-2013

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cover image ACM Other conferences
ISABEL '11: Proceedings of the 4th International Symposium on Applied Sciences in Biomedical and Communication Technologies
October 2011
949 pages
ISBN:9781450309134
DOI:10.1145/2093698
Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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  • Universitat Pompeu Fabra
  • IEEE
  • Technical University of Catalonia Spain: Technical University of Catalonia (UPC), Spain
  • River Publishers: River Publishers
  • CTTC: Technological Center for Telecommunications of Catalonia
  • CTIF: Kyranova Ltd, Center for TeleInFrastruktur

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Association for Computing Machinery

New York, NY, United States

Publication History

Published: 26 October 2011

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Author Tags

  1. MEMS
  2. RF-MEMS
  3. high performance
  4. integration
  5. microsystems
  6. packaging
  7. passive components
  8. reconfigurability
  9. telecommunications
  10. transceivers

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ISABEL '11
Sponsor:
  • Technical University of Catalonia Spain
  • River Publishers
  • CTTC
  • CTIF

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  • (2013)Design and analysis of RF MEMS Varactor for extended tuning range2013 International Conference on Control, Computing, Communication and Materials (ICCCCM)10.1109/ICCCCM.2013.6648915(1-4)Online publication date: Aug-2013

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