Jack and Chuck
Abstract
Index Terms
- Jack and Chuck
Recommendations
Jack and Chuck
SIGGRAPH '12: ACM SIGGRAPH 2012 Computer Animation FestivalChuck, the writer without arms, meets Smiley Jack, the strange, fat bearded salesman. A pact will be sealed to allow Chuck to regain the capacity to write.
Electrostatic chuck for EUV masks
For future extreme ultra violet (EUV) lithography at a wavelength of about 13nm, out-of-plane deviations sensitively transfer to in-plane distortions and high flatness is required for electrostatic clamping devices. At Fraunhofer IOF technology analysis ...
Electrostatic clamping with an EUVL mask chuck: Particle issues
Particle and defect issues related to electrostatic chucking with an ultra-planar, pin-structured mask chuck for EUVL application were addressed. By mapping particles/defects on the backside of 8 inch Si-wafers before and after chucking, particle ...
Comments
Information & Contributors
Information
Published In
Sponsors
In-Cooperation
Publisher
Association for Computing Machinery
New York, NY, United States
Publication History
Check for updates
Qualifiers
- Research-article
Conference
Acceptance Rates
Contributors
Other Metrics
Bibliometrics & Citations
Bibliometrics
Article Metrics
- 0Total Citations
- 28Total Downloads
- Downloads (Last 12 months)0
- Downloads (Last 6 weeks)0
Other Metrics
Citations
View Options
Login options
Check if you have access through your login credentials or your institution to get full access on this article.
Sign in