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Directed Self-Assembly (DSA) Template Pattern Verification

Published: 01 June 2014 Publication History

Abstract

Directed Self-Assembly (DSA) is a promising technique for contacts/vias patterning, where groups of contacts/vias are patterned by guiding templates. As the templates are patterned by traditional lithography, their shapes may vary due to the process variations, which will ultimately affect the contacts/vias even for the same type of template. Due to the complexity of the DSA process, rigorous process simulation is unacceptably slow for full chip verification. This paper formulate several critical problems in DSA verification, and proposes a design automation methodology that consists of a data preparation and a model learning stage. We present a novel DSA model with Point Correspondence and Segment Distance features for robust learning. Following the methodology, we propose an effective machine learning (ML) based method for DSA hotspot detection. The results of our initial experiments have already demonstrated the high-efficiency of our ML-based approach with over 85% detection accuracy. Compared to the minutes or even hours of simulation time in rigorous method, the methodology in this paper validates the research potential along this direction.

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Cited By

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  • (2024)Lightweight Hotspot Detection Model Fusing SE and ECA MechanismsMicromachines10.3390/mi1510121715:10(1217)Online publication date: 30-Sep-2024
  • (2023)Template Design for Complex Block Copolymer Patterns Using a Machine Learning MethodACS Applied Materials & Interfaces10.1021/acsami.3c0501815:25(31049-31056)Online publication date: 19-Jun-2023
  • (2023)Applications of VLSI Design in Artificial Intelligence and Machine LearningMachine Learning for VLSI Chip Design10.1002/9781119910497.ch1(1-17)Online publication date: 23-Jun-2023
  • Show More Cited By

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cover image ACM Other conferences
DAC '14: Proceedings of the 51st Annual Design Automation Conference
June 2014
1249 pages
ISBN:9781450327305
DOI:10.1145/2593069
Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than the author(s) must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected].

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Published: 01 June 2014

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Author Tags

  1. Directed Self-Assembly
  2. Hotspot
  3. Machine Learning
  4. Verification

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Overall Acceptance Rate 1,770 of 5,499 submissions, 32%

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Cited By

View all
  • (2024)Lightweight Hotspot Detection Model Fusing SE and ECA MechanismsMicromachines10.3390/mi1510121715:10(1217)Online publication date: 30-Sep-2024
  • (2023)Template Design for Complex Block Copolymer Patterns Using a Machine Learning MethodACS Applied Materials & Interfaces10.1021/acsami.3c0501815:25(31049-31056)Online publication date: 19-Jun-2023
  • (2023)Applications of VLSI Design in Artificial Intelligence and Machine LearningMachine Learning for VLSI Chip Design10.1002/9781119910497.ch1(1-17)Online publication date: 23-Jun-2023
  • (2019)A local optimal method on DSA guiding template assignment with redundant/dummy via insertionProceedings of the 24th Asia and South Pacific Design Automation Conference10.1145/3287624.3288748(305-310)Online publication date: 21-Jan-2019
  • (2018)Graph-Based Redundant Via Insertion and Guiding Template Assignment for DSA-MPIEEE Transactions on Very Large Scale Integration (VLSI) Systems10.1109/TVLSI.2018.2850044(1-14)Online publication date: 2018
  • (2018)Cut OptimizationPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography10.1007/978-3-319-76294-4_9(117-130)Online publication date: 21-Mar-2018
  • (2018)Verification of Guide PatternsPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography10.1007/978-3-319-76294-4_8(93-115)Online publication date: 21-Mar-2018
  • (2018)DSAL Mask SynthesisPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography10.1007/978-3-319-76294-4_7(77-92)Online publication date: 21-Mar-2018
  • (2017)Design Optimization Considering Guiding Template Feasibility and Redundant Via Insertion for Directed Self-AssemblyIEEE Transactions on Circuits and Systems I: Regular Papers10.1109/TCSI.2017.275074264:12(3172-3182)Online publication date: Dec-2017
  • (2017)Fast Verification of Guide-Patterns for Directed Self-Assembly LithographyIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems10.1109/TCAD.2016.262941936:9(1522-1531)Online publication date: Sep-2017
  • Show More Cited By

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