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Cell-Based Design Methods for Directed Self-Assembly

Published: 03 April 2016 Publication History

Abstract

Topographic templates can direct the self-assembly of block copolymers to achieve nanoscale patterns with high order. Previously, we have demonstrated well-aligned periodic lines, bends, and meshes using a sparse array of lithographically defined posts [1,2]. However, it is generally challenging to fabricate complex and non-periodic patterns using a sparse post array because the key information contained in the final pattern must be encoded in the sparse template. In this work, we present two cell-based design methods for fabricating complex patterns using directed self-assembly of polystyrene-b-polydimethylsiloxane (PS-b-PDMS) block copolymer thin films. For the first approach, we developed a set of template tiles consisting of square post lattices with a restricted range of geometric features. For all possible tile arrangements, we examined the resulting block copolymer patterns. We were able to predict a relatively simple template that will result in a desired complex pattern by combining tiles in different ways. For the second approach, we designed a binary-state system with ladder-shaped block copolymer structures using a square confinement. We developed design-rules for controlling alignment direction of the ladder-shaped structures by introducing openings around the square cells. These methods could provide a new template design method for a complex non-trivial block copolymer patterns.

References

[1]
Yang, J. K. W.; Jung, Y. S.; Chang, J.; Mickiewicz, R. A.; Alexander-Katz, A.; Ross, C. A.; Berggren, K. K., Complex self-assembled patterns using sparse commensurate templates with locally varying motifs. Nat. Nanotechnol. 2010, 5, 256--260.
[2]
Tavakkoli, A. K. G.; Gotrik, K. W.; Hannon, A. F.; Alexander-Katz, A; Ross, C. A.; Berggren, K. K., Templating three-dimensional self-assembled structures in bilayer block copolymer films, Science 2012, 336 (6086), 1294--1298.

Cited By

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  • (2019)DSA-Compliant Routing for 2-D Patterns Using Block Copolymer LithographyIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems10.1109/TCAD.2018.281212238:2(267-280)Online publication date: Feb-2019
  • (2017)Detailed Placement for Two-Dimensional Directed Self-Assembly TechnologyProceedings of the 54th Annual Design Automation Conference 201710.1145/3061639.3062229(1-6)Online publication date: 18-Jun-2017

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  1. Cell-Based Design Methods for Directed Self-Assembly

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    cover image ACM Conferences
    ISPD '16: Proceedings of the 2016 on International Symposium on Physical Design
    April 2016
    180 pages
    ISBN:9781450340397
    DOI:10.1145/2872334
    Permission to make digital or hard copies of part or all of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for third-party components of this work must be honored. For all other uses, contact the Owner/Author.

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    Association for Computing Machinery

    New York, NY, United States

    Publication History

    Published: 03 April 2016

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    Author Tags

    1. block copolymer
    2. directed self-assembly
    3. rule-based design

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    • Invited-talk

    Funding Sources

    • Taiwan Semiconductor Manufacturing Company
    • National Science Foundation

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    ISPD'16
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    ISPD'16: International Symposium on Physical Design
    April 3 - 6, 2016
    California, Santa Rosa, USA

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    Overall Acceptance Rate 62 of 172 submissions, 36%

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    • (2019)DSA-Compliant Routing for 2-D Patterns Using Block Copolymer LithographyIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems10.1109/TCAD.2018.281212238:2(267-280)Online publication date: Feb-2019
    • (2017)Detailed Placement for Two-Dimensional Directed Self-Assembly TechnologyProceedings of the 54th Annual Design Automation Conference 201710.1145/3061639.3062229(1-6)Online publication date: 18-Jun-2017

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