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Study on Performance of an Air Spring Isolator for Large-Scale Precision Optical Micro-Vibration Isolation

Published: 17 May 2021 Publication History

Abstract

To realize high payload and ultra-low frequency isolation characteristics and effectively restrain the influence of microvibration in the environment on the accuracy of large precision/ultra-precision optical instruments, a high precision analysis method for the performance of air spring isolators is presented. The analysis method that combining theory with simulation studies the structural stiffness and material stiffness characteristics of an air spring isolator respectively, which effectively solves the problem that the traditional theoretical models could not guide the optimization design and precision machining of air spring isolators accurately due to their neglecting of the elastic membrane material stiffness. The analysis results show that the stiffness and stiffness ratio of the elastic membrane increase with the rise of inflatable pressure in the chamber. Structural designs of large chamber volume and small bearing area, the working pattern of high inflatable pressure, as well as material parameters of large cord angle and a small distance from cord to the neutral surface of the elastic membrane, are beneficial to reduce the stiffness of the air spring isolator. The research is beneficial to realize the low stiffness and ultra-low frequency isolation of air spring isolators.

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        cover image ACM Other conferences
        ICITEE '20: Proceedings of the 3rd International Conference on Information Technologies and Electrical Engineering
        December 2020
        687 pages
        ISBN:9781450388665
        DOI:10.1145/3452940
        Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credit is permitted. To copy otherwise, or republish, to post on servers or to redistribute to lists, requires prior specific permission and/or a fee. Request permissions from [email protected]

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        Association for Computing Machinery

        New York, NY, United States

        Publication History

        Published: 17 May 2021

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        Author Tags

        1. Air spring isolator
        2. Material stiffness
        3. Precision optical isolation
        4. Structural stiffness
        5. Ultra-low frequency isolation

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        • National Natural Science Foundation of China

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        ICITEE2020

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