ABSTRACT
To improve the accuracy of kerf angle, an automatic calibration method for kerf angle in wafer automated optical inspection is presented. First, the error model of inspection system is established and system angle deviations are calibrated. Next, normalized positioning-based the kerf edges of interest in multiple images are extracted. Then, the coordinate transformation considering the system angle deviation compensation is performed. Finally, the kerf edge line is fitted based on the least squares method to obtain the kerf angle and the kerf angle can be automatically calibrated by rotating the stage. The experimental results show that the kerf angle obtained is relatively stable by coordinate transformation of multiple images to enhance the information of kerf edge and the accuracy of kerf angle can reach within 0.02 degree. Besides, the kerf angle is more sensitive to the system angle deviation and the result is basically a linear increase.
- Abd Al Rahman M, Mousavi A. A Review and Analysis of Automatic Optical Inspection and Quality Monitoring Methods in Electronics Industry. IEEE Access, 2020.Google Scholar
- Chen X, Chen J, Han X, A Light-Weighted CNN Model for Wafer Structural Defect Detection. IEEE Access, 2020, 8: 24006-24018.Google ScholarCross Ref
- Li H F, Pao D, Jayakumar R. Improvements and systolic implementation of the Hough transformation for straight line detection. Pattern Recognition, 1989, 22(6): 697-706.Google ScholarDigital Library
- York D. Least-squares fitting of a straight line. Canadian Journal of Physics, 1966, 44(5): 1079-1086.Google ScholarCross Ref
- York D. Least squares fitting of a straight line with correlated errors. Earth and planetary science letters, 1968, 5: 320-324.Google Scholar
- Lu X, Song L, Shen S, Parallel Hough transform-based straight line detection and its FPGA implementation in embedded vision. Sensors, 2013, 13(7): 9223-9247.Google ScholarCross Ref
- Bergues G J, Schürrer C, Brambilla N. Straight Line Detection Through Sub-pixel Hough Transform. Intelligent Computing-Proceedings of the Computing Conference. Springer, Cham, 2019: 1129-1137.Google Scholar
- Krystek M, Anton M. A least-squares algorithm for fitting data points with mutually correlated coordinates to a straight line. Measurement science and technology, 2011, 22(3): 035101.Google Scholar
- Wang J, Wang J, Shao J, Image recognition of icing thickness on power transmission lines based on a least squares Hough transform. Energies, 2017, 10(4): 415.Google ScholarCross Ref
- Xue B, Tong N. DIOD: Fast and efficient weakly semi-supervised deep complex ISAR object detection. IEEE Transactions on Cybernetics, 2019, 49(11): 3991-4003.Google ScholarCross Ref
- Xue B, Tong N. Real-world ISAR object recognition using deep multimodal relation learning. IEEE transactions on cybernetics, 2019, 50(10): 4256-4267.Google ScholarCross Ref
- Xue B, Yi W, Jing F, Complex ISAR target recognition using deep adaptive learning. Engineering Applications of Artificial Intelligence, 2021, 97: 104025.Google ScholarCross Ref
- Li X, Li J, Hu X, Line-CNN: End-to-End Traffic line detection with line proposal unit. IEEE Transactions on Intelligent Transportation Systems, 2019, 21(1): 248-258.Google ScholarCross Ref
- Pei S C, Horng J H. Circular arc detection based on Hough transform. Pattern recognition letters, 1995, 16(6): 615-625.Google Scholar
- Otsu N. A threshold selection method from gray-level histograms. IEEE transactions on systems, man, and cybernetics, 1979, 9(1): 62-66.Google ScholarCross Ref
- Suzuki S. Topological structural analysis of digitized binary images by border following. Computer vision, graphics, and image processing, 1985, 30(1): 32-46.Google Scholar
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