skip to main content
research-article

A Deep Learning Framework for Solving Stress-based Partial Differential Equations in Electromigration Analysis

Published: 17 May 2023 Publication History

Abstract

The electromigration-induced reliability issues (EM) in very large scale integration (VLSI) circuits have attracted continuous attention due to technology scaling. Traditional EM methods lead to inaccurate results incompatible with the advanced technology nodes. In this article, we propose a learning-based model by enforcing physical constraints of EM kinetics to solve the EM reliability problem. The method aims at solving stress-based partial differential equations (PDEs) to obtain the hydrostatic stress evolution on interconnect trees during the void nucleation phase, considering varying atom diffusivity on each segment, which is one of the EM random characteristics. The approach proposes a crafted neural network-based framework customized for the EM phenomenon and provides mesh-free solutions benefiting from the employment of automatic differentiation (AD). Experimental results obtained by the proposed model are compared with solutions obtained by competing methods, showing satisfactory accuracy and computational savings.

References

[1]
Martín Abadi, Paul Barham, Jianmin Chen, Zhifeng Chen, Andy Davis, Jeffrey Dean, Matthieu Devin, Sanjay Ghemawat, Geoffrey Irving, Michael Isard, Manjunath Kudlur, Josh Levenberg, Rajat Monga, Sherry Moore, Derek G. Murray, Benoit Steiner, Paul Tucker, Vijay Vasudevan, Pete Warden, Martin Wicke, Yuan Yu, and Xiaoqiang Zheng. 2016. TensorFlow: A system for large-scale machine learning. In Proceedings of the 12th USENIX Symposium on Operating Systems Design and Implementation (OSDI’16). 265–283.
[2]
Syed Mohiul Alam, Donald E. Troxel, and Carl V. Thompson. 2004. Design Tool and Methodologies for Interconnect Reliability Analysis in Integrated Circuits. Ph.D. Dissertation. Massachusetts Institute of Technology.
[3]
Atilim Gunes Baydin, Barak A. Pearlmutter, Alexey Andreyevich Radul, and Jeffrey Mark Siskind. 2015. Automatic differentiation in machine learning: A survey. (2015). arxiv:1502.05767
[4]
J. R. Black. 1969. Electromigration–A brief survey and some recent results. IEEE Trans. Electron. Devices 16, 4 (1969), 338–347.
[5]
I. A. Blech. 1976. Electromigration in thin aluminum films on titanium nitride. J. Appl. Phys. 47, 4 (1976), 1203–1208.
[6]
Sandeep Chatterjee, Valeriy Sukharev, and Farid N. Najm. 2018. Power grid electromigration checking using physics-based models. IEEE Trans. Comput.-Aid. Des. Integ. Circ. Syst. 37, 7 (2018), 1317–1330.
[7]
Hai-Bao Chen, Sheldon X.-D. Tan, Xin Huang, Taeyoung Kim, and Valeriy Sukharev. 2016. Analytical modeling and characterization of electromigration effects for multibranch interconnect trees. IEEE Trans. Comput.-Aid. Des. Integ. Circ. Syst. 35, 11 (2016), 1811–1824.
[8]
Liang Chen, Sheldon X.-D. Tan, Zeyu Sun, Shaoyi Peng, Min Tang, and Junfa Mao. 2020. Fast analytic electromigration analysis for general multisegment interconnect wires. IEEE Trans. Very Large Scale Integ. Syst. 28, 2 (2020), 421–432.
[9]
Liang Chen, Sheldon X.-D. Tan, Zeyu Sun, Shaoyi Peng, Min Tang, and Junfa Mao. 2021. A fast semi-analytic approach for combined electromigration and thermomigration analysis for general multisegment interconnects. IEEE Trans. Comput.-Aid. Des. Integ. Circ. Syst. 40, 2 (2021), 350–363.
[10]
Bengt Fornberg. 1981. Numerical differentiation of analytic functions. ACM Trans. Math. Softw. 7, 4 (1981), 512–526.
[11]
Johannes Grabmeier, Erich Kaltofen, and Volker Weispfenning. 2003. Computer Algebra: Historical Development, Characterization, and Prospects. Springer-Verlag, Berlin, 1–9.
[12]
Stefan P. Hau-Riege and Carl V. Thompson. 2000. The effects of the mechanical properties of the confinement material on electromigration in metallic interconnects. J. Mater. Res. 15, 8 (2000), 1797–1802.
[13]
M. Hauschildt, C. Hennesthal, G. Talut, O. Aubel, M. Gall, K. B. Yeap, and E. Zschech. 2013. Electromigration early failure void nucleation and growth phenomena in Cu and Cu(Mn) interconnects. In Proceedings of the IEEE International Reliability Physics Symposium. 2C.1.1–2C.1.6.
[14]
Kaiming He, Xiangyu Zhang, Shaoqing Ren, and Jian Sun. 2016. Deep residual learning for image recognition. In Proceedings of the IEEE Conference on Computer Vision and Pattern Recognition. 770–778.
[15]
Kurt Hornik, Maxwell Stinchcombe, and Halbert White. 1989. Multilayer feedforward networks are universal approximators. Neural Netw. 2, 5 (1989), 359–366.
[16]
Tianshu Hou, Ngai Wong, Quan Chen, Zhigang Ji, and Hai-Bao Chen. 2022. A space-time neural network for analysis of stress evolution under DC current stressing. IEEE Trans. Comput.-Aid. Des. Integ. Circ. Syst. (2022), 1–14. DOI:
[17]
Xin Huang, Armen Kteyan, Sheldon X.-D. Tan, and Valeriy Sukharev. 2016. Physics-based electromigration models and full-chip assessment for power grid networks. IEEE Trans. Comput.-Aid. Des. Integ. Circ. Syst. 35, 11 (2016), 1848–1861.
[18]
Xin Huang, Tan Yu, Valeriy Sukharev, and Sheldon X.-D. Tan. 2014. Physics-based electromigration assessment for power grid networks. In Proceedings of the 51st Annual Design Automation Conference. 1–6.
[19]
Wentian Jin, Liang Chen, Sheriff Sadiqbatcha, Shaoyi Peng, and Sheldon X.-D. Tan. 2021. EMGraph: Fast learning-based electromigration analysis for multi-segment interconnect using graph convolution networks. In Proceedings of the 58th ACM/IEEE Design Automation Conference (DAC). 919–924.
[20]
Wentian Jin, Shaoyi Peng, and Sheldon X.-D. Tan. 2021. Data-driven electrostatics analysis based on physics-constrained deep learning. In Proceedings of the Design, Automation Test in Europe Conference Exhibition (DATE). 1382–1387.
[21]
Matt A. Korhonen, P. Borgesen, K. N. Tu, and Che-Yu Li. 1993. Stress evolution due to electromigration in confined metal lines. J. Appl. Phys. 73, 8 (1993), 3790–3799.
[22]
Isaac E. Lagaris, Aristidis Likas, and Dimitrios I. Fotiadis. 1998. Artificial neural networks for solving ordinary and partial differential equations. IEEE Trans. Neural Netw. 9, 5 (1998), 987–1000.
[23]
Zongyi Li, Nikola B. Kovachki, Kamyar Azizzadenesheli, Burigede Liu, Kaushik Bhattacharya, Andrew M. Stuart, and Anima Anandkumar. 2020. Fourier neural operator for parametric partial differential equations. CoRR abs/2010.08895 (2020). arXiv:2010.08895
[24]
J. R. Lloyd. 2008. New models for interconnect failure in advanced IC technology. In Proceedings of the 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits. 1–7.
[25]
Xuhui Meng, Zhen Li, Dongkun Zhang, and George Em Karniadakis. 2019. PPINN: Parareal Physics-Informed Neural Network for time-dependent PDEs. (2019). arxiv:1909.10145
[26]
S. R. Nassif. 2008. Power grid analysis benchmarks. In Proceedings of the Asia and South Pacific Design Automation Conference. 376–381.
[27]
Milton Ohring. 1998. In Reliability and Failure of Electronic Materials and Devices. Elsevier.
[28]
Adam Paszke, Sam Gross, Gregory Chanan Soumith Chintala, Edward Yang Zachary DeVito, Zeming Lin, Alban Desmaison, Luca Antiga, and Adam Lerer. 2017. Automatic differentiation in Pytorch. In Proceedings of the NIPS Workshop.
[29]
Kexin Pei, Yinzhi Cao, Junfeng Yang, and Suman Jana. 2017. DeepXplore: Automated Whitebox Testing of Deep Learning Systems. (2017). arxiv:1705.06640
[30]
Maziar Raissi, Paris Perdikaris, and George E. Karniadakis. 2019. Physics-informed neural networks: A deep learning framework for solving forward and inverse problems involving nonlinear partial differential equations. J. Comput. Phys. 378 (2019), 686–707.
[31]
Lars Ruthotto and Eldad Haber. 2018. Deep Neural Networks Motivated by Partial Differential Equations. (2018). arxiv:1804.04272
[32]
Chang Shu, Hang Ding, and K. S. Yeo. 2003. Local radial basis function-based differential quadrature method and its application to solve two-dimensional incompressible Navier-Stokes equations. Comput. Meth. Appl. Mech. Eng. 192, 7 (2003), 941–954.
[33]
Valeriy Sukharev, Armen Kteyan, and Xin Huang. 2016. Postvoiding stress evolution in confined metal lines. IEEE Trans. Device Mater. Reliab. 16, 1 (2016), 50–60.
[34]
Zeyu Sun, Shuyuan Yu, Han Zhou, Yibo Liu, and Sheldon X.-D. Tan. 2020. EMSpice: Physics-based electromigration check using coupled electronic and stress simulation. IEEE Trans. Device Mater. Reliab. 20, 2 (2020), 376–389.
[35]
Xiaoyi Wang, Shaobin Ma, Sheldon X.-D. Tan, Chase Cook, Liang Chen, Jianlei Yang, and Wenjian Yu. 2021. Fast physics-based electromigration analysis for full-chip networks by efficient eigenfunction-based solution. IEEE Trans. Comput.-Aid. Des. Integ. Circ. Syst. 40, 3 (2021), 507–520.
[36]
Gang-Zhou Wu, Yin Fang, Yue-Yue Wang, Guo-Cheng Wu, and Chao-Qing Dai. 2021. Predicting the dynamic process and model parameters of the vector optical solitons in birefringent fibers via the modified PINN. Chaos, Solitons Fract. 152 (2021), 111393.
[37]
Yaohua Zang, Gang Bao, Xiaojing Ye, and Haomin Zhou. 2020. Weak adversarial networks for high-dimensional partial differential equations. J. Comput. Phys. 411 (2020), 109409.

Cited By

View all
  • (2025)An electro-thermo-mechanical coupling phase-field model of defect evolution induced by electromigration in interconnectsInternational Journal of Mechanical Sciences10.1016/j.ijmecsci.2024.109792285(109792)Online publication date: Jan-2025
  • (2024)Electromigration Analysis for Interconnects Using Improved Graph Convolutional Network with Edge Feature AggregationMicromachines10.3390/mi1508104615:8(1046)Online publication date: 18-Aug-2024
  • (2024)Physics-Informed Learning Based Multiphysics Simulation for Fast Transient TSV Electromigration AnalysisACM Transactions on Design Automation of Electronic Systems10.1145/370610630:2(1-22)Online publication date: 29-Nov-2024

Index Terms

  1. A Deep Learning Framework for Solving Stress-based Partial Differential Equations in Electromigration Analysis

    Recommendations

    Comments

    Information & Contributors

    Information

    Published In

    cover image ACM Transactions on Design Automation of Electronic Systems
    ACM Transactions on Design Automation of Electronic Systems  Volume 28, Issue 4
    July 2023
    432 pages
    ISSN:1084-4309
    EISSN:1557-7309
    DOI:10.1145/3597460
    Issue’s Table of Contents

    Publisher

    Association for Computing Machinery

    New York, NY, United States

    Journal Family

    Publication History

    Published: 17 May 2023
    Online AM: 10 October 2022
    Accepted: 23 September 2022
    Revised: 15 September 2022
    Received: 14 April 2022
    Published in TODAES Volume 28, Issue 4

    Permissions

    Request permissions for this article.

    Check for updates

    Author Tags

    1. Electromigration
    2. hydrostatic stress
    3. interconnect tree
    4. neural network

    Qualifiers

    • Research-article

    Funding Sources

    • National Key Research and Development Program of China

    Contributors

    Other Metrics

    Bibliometrics & Citations

    Bibliometrics

    Article Metrics

    • Downloads (Last 12 months)148
    • Downloads (Last 6 weeks)14
    Reflects downloads up to 01 Mar 2025

    Other Metrics

    Citations

    Cited By

    View all
    • (2025)An electro-thermo-mechanical coupling phase-field model of defect evolution induced by electromigration in interconnectsInternational Journal of Mechanical Sciences10.1016/j.ijmecsci.2024.109792285(109792)Online publication date: Jan-2025
    • (2024)Electromigration Analysis for Interconnects Using Improved Graph Convolutional Network with Edge Feature AggregationMicromachines10.3390/mi1508104615:8(1046)Online publication date: 18-Aug-2024
    • (2024)Physics-Informed Learning Based Multiphysics Simulation for Fast Transient TSV Electromigration AnalysisACM Transactions on Design Automation of Electronic Systems10.1145/370610630:2(1-22)Online publication date: 29-Nov-2024

    View Options

    Login options

    Full Access

    View options

    PDF

    View or Download as a PDF file.

    PDF

    eReader

    View online with eReader.

    eReader

    Full Text

    View this article in Full Text.

    Full Text

    Figures

    Tables

    Media

    Share

    Share

    Share this Publication link

    Share on social media